α-Cr2O3 template-texture effect on α-Al2O3 thin-film growth
2008 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 516, no 21, 7447-7450 p.Article in journal (Refereed) Published
We employ textured α-Cr2O3 thin films as templates for growth of α-Al2O3 by reactive inductively coupled plasma magnetron sputtering. The texture of the template has a strong influence on the nucleation and growth of α-Al2O3. Extended growth of α-Al2O3 at a substrate temperature of 450 °C is obtained using a predominantly [101̄4]-textured α-Cr2O3 template layer, while only limited α-Al2O3 nucleation is seen on a -textured α-Cr2O3 template.
Place, publisher, year, edition, pages
Elsevier, 2008. Vol. 516, no 21, 7447-7450 p.
X-ray diffraction (XRD);Transmission electron microscopy (TEM);Aluminum oxide;
Other Materials Engineering
IdentifiersURN: urn:nbn:se:liu:diva-107927DOI: 10.1016/j.tsf.2008.03.038OAI: oai:DiVA.org:liu-107927DiVA: diva2:728085