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Fast growth rate epitaxy on 4((degrees)under-bar) off-cut 4-inch diameter 4H-SiC wafers
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
Applied Materials Lab., Components R&D Center, LG Innotek Co., Ltd.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
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2014 (English)In: SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2, Trans Tech Publications , 2014, Vol. 778-780, 179-182 p.Conference paper, Published paper (Refereed)
Abstract [en]

We report the development of over 100 mu m/h growth rate process on 4-inch diameter wafers using chlorinated growth. The optimized growth process has shown extremely smooth epilayers completely free of surface step-bunching with very low surface defect density, high uniformity in thickness and doping and high run to run reproducibility in growth rate, controlled doping and defect density.

Place, publisher, year, edition, pages
Trans Tech Publications , 2014. Vol. 778-780, 179-182 p.
Series
Materials Science Forum, ISSN 1662-9752 ; 778-780
Keyword [en]
Fast epitaxial growth; high growth rate; chlorinated growth; atomic force microscopy
National Category
Other Materials Engineering
Identifiers
URN: urn:nbn:se:liu:diva-108193DOI: 10.4028/www.scientific.net/MSF.778-780.179ISI: 000336634100042OAI: oai:DiVA.org:liu-108193DiVA: diva2:729507
Conference
15th International Conference on Silicon Carbide and Related Materials (ICSCRM), Miyazaki, Japan, 29 Sptember - 4 October 2013
Available from: 2014-06-26 Created: 2014-06-26 Last updated: 2016-06-02Bibliographically approved

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Ul-Hassan, JawadLilja, LouiseFarkas, IldikoStenberg, PontusSun, JianwuKordina, OlleBergman, PederJanzén, Erik

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Ul-Hassan, JawadLilja, LouiseFarkas, IldikoStenberg, PontusSun, JianwuKordina, OlleBergman, PederJanzén, Erik
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Semiconductor MaterialsThe Institute of Technology
Other Materials Engineering

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