liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Reactive sputtering of delta-ZrH2 thin films by high power impulse magnetron sputtering and direct current magnetron sputtering
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Impact Coatings AB, Linköping, Sweden .
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Show others and affiliations
2014 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 32, no 4, 041510- p.Article in journal (Refereed) Published
Abstract [en]

Reactive sputtering by high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS) of a Zr target in Ar/H-2 plasmas was employed to deposit Zr-H films on Si(100) substrates, and with H content up to 61 at.% and O contents typically below 0.2 at.% as determined by elastic recoil detection analysis. X-ray photoelectron spectroscopy reveals a chemical shift of similar to 0.7 eV to higher binding energies for the Zr-H films compared to pure Zr films, consistent with a charge transfer from Zr to H in a zirconium hydride. X-ray diffraction shows that the films are single-phase delta-ZrH2 (CaF2 type structure) at H content greater thansimilar to 55 at.% and pole figure measurements give a 111 preferred orientation for these films. Scanning electron microscopy cross-section images show a glasslike microstructure for the HiPIMS films, while the DCMS films are columnar. Nanoindentation yield hardness values of 5.5-7 GPa for the delta-ZrH2 films that is slightly harder than the similar to 5 GPa determined for Zr films and with coefficients of friction in the range of 0.12-0.18 to compare with the range of 0.4-0.6 obtained for Zr films. Wear resistance testing show that phase-pure delta-ZrH2 films deposited by HiPIMS exhibit up to 50 times lower wear rate compared to those containing a secondary Zr phase. Four-point probe measurements give resistivity values in the range of similar to 100-120 mu Omega cm for the delta-ZrH2 films, which is slightly higher compared to Zr films with values in the range 70-80 mu Omega cm.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2014. Vol. 32, no 4, 041510- p.
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-109234DOI: 10.1116/1.4882859ISI: 000338718400022OAI: oai:DiVA.org:liu-109234DiVA: diva2:737182
Available from: 2014-08-12 Created: 2014-08-11 Last updated: 2017-12-05Bibliographically approved

Open Access in DiVA

fulltext(1152 kB)285 downloads
File information
File name FULLTEXT01.pdfFile size 1152 kBChecksum SHA-512
bf47f9a8257b074e9b3f10f0349533c9fd9712a26df869e5253ab9705062dc71d2109bc45721b3353223f2a97bcd640410c379a7420e207d46250fb050e6834b
Type fulltextMimetype application/pdf

Other links

Publisher's full text

Authority records BETA

Högberg, HansTengdelius, LinaEriksson, FredrikBroitman, EstebanLu, JunJensen, JensHultman, Lars

Search in DiVA

By author/editor
Högberg, HansTengdelius, LinaEriksson, FredrikBroitman, EstebanLu, JunJensen, JensHultman, Lars
By organisation
Thin Film PhysicsThe Institute of TechnologyFaculty of Arts and Sciences
In the same journal
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar
Total: 285 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 356 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf