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Silicon carbide field effect transistors for detection of ultra-low concentrations of hazardous volatile organic compounds
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, The Institute of Technology. Saarland University, Saarbruecken, Germany.
Saarland University, Saarbruecken, Germany.
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2014 (English)In: Materials Science Forum, ISSN 0255-5476, E-ISSN 1662-9752, Vol. 778-780, 1067-1070 p.Article in journal (Refereed) Published
Abstract [en]

Gas sensitive silicon carbide field effect transistors with nanostructured Ir gate layershave been used for the first time for sensitive detection of volatile organic compounds (VOCs) atpart per billion level, for indoor air quality applications. Formaldehyde, naphthalene, and benzenehave been used as typical VOCs in dry air and under 10% and 20% relative humidity. A singleVOC was used at a time to study long-term stability, repeatability, temperature dependence, effectof relative humidity, sensitivity, response and recovery times of the sensors.

Place, publisher, year, edition, pages
2014. Vol. 778-780, 1067-1070 p.
Keyword [en]
Silicon carbide, MISFET, Gas sensors, Volatile organic compounds, Indoor air quality
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-109869DOI: 10.4028/www.scientific.net/MSF.778-780.1067ISI: 000336634100254OAI: oai:DiVA.org:liu-109869DiVA: diva2:741554
Note

A short term scientific mission (STSM) grant is acknowledged from the COST Action TD1105. SenSiC AB, Sweden, is acknowledged for providing the SiC-FET sensors.

Available from: 2014-08-28 Created: 2014-08-28 Last updated: 2017-12-05Bibliographically approved

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Puglisi, DonatellaEriksson, JensBur, ChristianLloyd Spetz, AnitaAndersson, Mike

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Puglisi, DonatellaEriksson, JensBur, ChristianLloyd Spetz, AnitaAndersson, Mike
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