Comparison of carrier lifetime measurements and mapping in 4H SIC using time resolved photoluminescence and μ-PCD
2014 (English)In: SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2, Stafa-Zurich, Switzerland: Trans Tech Publications , 2014, Vol. 778-780, 301-304 p.Conference paper (Refereed)
Carrier lifetime measurements and wafer mappings have been done on several different 4H SiC epiwafers to compare two different measurement techniques, time-resolved photoluminescence and microwave induced photoconductivity decay. The absolute values of the decay time differ by a factor of two, as expected from recombination and measurement theory. Variations within each wafer are comparable with the two techniques. Both techniques are shown to be sensitive to substrate quality and distribution of extended defects.
Place, publisher, year, edition, pages
Stafa-Zurich, Switzerland: Trans Tech Publications , 2014. Vol. 778-780, 301-304 p.
, Materials Science Forum, ISSN 0255-5476 ; vol 778-780
Carrier lifetime; Photoluminescence; Silicon carbide; μ-PCD
IdentifiersURN: urn:nbn:se:liu:diva-110541DOI: 10.4028/www.scientific.net/MSF.778-780.301ISI: 000336634100071ScopusID: 2-s2.0-84896069395ISBN: 9783038350101OAI: oai:DiVA.org:liu-110541DiVA: diva2:746884
15th International Conference on Silicon Carbide and Related Materials, ICSCRM 2013