Polytype pure sp2-BN thin films as dictated by the substrate crystal structure
2015 (English)In: Chemistry of Materials, ISSN 0897-4756, E-ISSN 1520-5002, Vol. 27, no 5, 1640-1645 p.Article in journal (Refereed) Published
Boron nitride (BN) is a promising semiconductor material, but its current exploration is hampered by difficulties in growth of single crystalline phase-pure thin films. We compare the growth of sp2-BN by chemical vapor deposition on (0001) 6H-SiC and on (0001) α-Al2O3 substrates with an AlN buffer layer. Polytype-pure rhombohedral BN (r-BN) with a thickness of 200 nm is observed on SiC whereas hexagonal BN (h-BN) nucleates and grows on the AlN buffer layer. For the latter case after a thickness of 4 nm, the h-BN growth is followed by r-BN growth to a total thickness of 200 nm. We find that the polytype of the sp2-BN films is determined by the ordering of Si-C or Al-N atomic pairs in the underlying crystalline structure (SiC or AlN). In the latter case the change from h-BN to r-BN is triggered by stress relaxation. This is important for the development of BN semiconductor device technology.
Place, publisher, year, edition, pages
Washington: American Chemical Society (ACS), 2015. Vol. 27, no 5, 1640-1645 p.
IdentifiersURN: urn:nbn:se:liu:diva-112577DOI: 10.1021/cm5043815ISI: 000350919000025OAI: oai:DiVA.org:liu-112577DiVA: diva2:768463
This work was supported by the Swedish Research Council (VR, Grant 621-2013-5585), Carl Tryggers Foundation (No. 12:175), and the CeNano program at Linkoping University. H.H. acknowledges support from the Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU No. 2009-00971). Z.C. acknowledges the support of the Bolyai Janos research scholarship of the Hungarian Academy of Sciences. The Knut and Alice Wallenberg (KAW) Foundation is acknowledged for the Electron Microscope Laboratory in Linkoping. Sven G. Andersson is gratefully acknowledged for his technical support of the growth activities.2014-12-042014-12-042015-04-21Bibliographically approved