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Thin Film Humidity Sensors (Sensores de Humedad de Película Delgada)
University of Buenos Aires, Argentina.ORCID iD: 0000-0003-3277-1945
University of Buenos Aires, Argentina.
University of Buenos Aires.
University of Buenos Aires.
1991 (English)In: Anales AFA, ISSN 1850 – 1158, Vol. 2, no 1, 277-279 p.Article in journal (Refereed) Published
Abstract [en]

In this paper the construction and characterization of a humidity sensor with an alumina thin film responsive element is described. The capacitive sensor, made by thin film technology, consists of a dielectric layer of Al2O3 film deposited between metal electrodes.

Abstract [es]

En este trabajo se describe la construcción y caracterización de un sensor de humedad que emplea como elemento sensible alúmina. Se trata de un sensor capacitivo constituido por una capa dieléctrica de Al2O3 entre electrodos metálicos, fabricado con tecnología de película delgada.

Place, publisher, year, edition, pages
Buenos Aires, Argentina: Asociacion Fisica Argentina , 1991. Vol. 2, no 1, 277-279 p.
National Category
Other Materials Engineering
URN: urn:nbn:se:liu:diva-112935OAI: diva2:774516
Available from: 2014-12-23 Created: 2014-12-23 Last updated: 2015-01-13Bibliographically approved

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Broitman, Esteban
Other Materials Engineering

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