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Thin Film Temperature Sensors (Sensores de Temperatura de Película Delgada)
University of Buenos Aires, Argentina.ORCID iD: 0000-0003-3277-1945
University of Buenos Aires, Argentina.
University of Buenos Aires, Argentina.
1990 (English)In: Anales AFA, ISSN 1850-1158, Vol. 1, no 1, 336-338 p.Article in journal (Refereed) Published
Abstract [en]

Ni thin films of 1800 Å thick were deposited by ion-plating and designed by photolithography to be used as temperature sensors. The resistive paths were finished with contact Cu welding terminals. After being coated with a protective layer of SiOx, they were subjected to heat stabilization treatments. Small, stable and accurate sensors were obtained.

Abstract [es]

Se depositaron trayectos de película delgada de Ni de 1800 Á de espesor diseñados por fotolitografía para ser usados como sensores de temperatura. Los trayectos resistivos fueron provistos de contactos de Cu para soldar terminales. Después de ser recubiertos con una capa de OSi como protección, fueron sometidos a un tratamiento térmico de estabilización. Se obtuvieron sensores pequeños, estables y precisos.

Place, publisher, year, edition, pages
Buenos Aires, Argentina: Asociacion Fisica Argentina , 1990. Vol. 1, no 1, 336-338 p.
National Category
Manufacturing, Surface and Joining Technology
URN: urn:nbn:se:liu:diva-112936OAI: diva2:774521
Available from: 2014-12-23 Created: 2014-12-23 Last updated: 2015-01-13Bibliographically approved

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Broitman, Esteban
Manufacturing, Surface and Joining Technology

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