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Assessment of H-intercalated graphene for microwave FETs through material characterization and electron transport studies
Chalmers, Sweden.
Chalmers, Sweden.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.ORCID iD: 0000-0003-1000-0437
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
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2015 (English)In: Carbon, ISSN 0008-6223, E-ISSN 1873-3891, Vol. 81, 96-104 p.Article in journal (Refereed) Published
Abstract [en]

Epitaxial graphene is grown on semi-insulating (SI) 4H-SiC in a hot wall CVD reactor by graphitization and in-situ intercalation with (H)ydrogen. A holistic material characterization is performed in order to ascertain the number of layers, layer uniformity, and electron transport properties of the epi-layers via electronic test structures and Raman spectroscopy. Bilayer graphene field effect transistors (GFETs) are fabricated using a full electron beam lithography (EBL) process which is optimized for low contact resistances of r(c) less than 0.2 Omega mm. Mobilities of order 2500 cm(2)/V s are achieved on bilayer samples after fabrication. The devices demonstrate high transconductance g(m) = 400 mS/mm and high current density I-ds = 1.8 A/mm. The output conductance at the bias of maximum transconductance is g(ds) = 300 mS/mm. The GFETs demonstrate an extrinsic f(t)(ext) and f(max)(ext) of 20 and 13 GHz, respectively and show 6 dB power gain at 1 GHz in a 50 Omega system, which is the highest reported to date.

Place, publisher, year, edition, pages
Elsevier , 2015. Vol. 81, 96-104 p.
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Chemical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-113163DOI: 10.1016/j.carbon.2014.09.029ISI: 000345682900011OAI: oai:DiVA.org:liu-113163DiVA: diva2:780359
Note

Funding Agencies|European Science Foundation (ESF) under the EUROCORES Program EuroGRAPHENE; EU Graphene Flagship [604391]; Swedish Foundation for Strategic Research (SSF); Knut and Alice Wallenberg Foundation (KAW); EPIGRAT project

Available from: 2015-01-14 Created: 2015-01-12 Last updated: 2017-12-05

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Gueorguiev Ivanov, Ivanul-Hassan, JawadJanzén, Erik

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