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Increasing the Selectivity of Pt-Gate SiC FieldEffect Gas Sensors by Dynamic Temperature Modulation
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, The Institute of Technology. Saarland University, Saarbruecken, Germany. (Applied Sensor Science & Dept. of Mechatronics Lab for Measurement Technology)
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, The Institute of Technology. (Applied Sensor Science)
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, The Institute of Technology. (Applied Sensor Science)ORCID iD: 0000-0002-2817-3574
Saarland University, Saarbruecken, Germany. (Dept. of Mechatronics Lab for Measurement Technology)
2014 (English)In: Proc of E-MRS 2014, Lille, France, May 26-30, 2014, 1-9 p.Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

Based on a diode coupled silicon carbide field effect transistor with platinum as catalytic gate material, the influence of dynamic temperature modulation on the selectivity of GasFETs has been investigated. This operating mode, studied intensively for semiconductor gas sensors, has only recently been applied to field effect transistors. A suitable temperature cycle (T-cycle) for detection of typical exhaust gases (CO, NO, C3H6, H2, NH3) was developed and combined with appropriate signal processing. The sensor data was evaluated using multivariate statistics, e.g. linear discriminant analysis (LDA). Measurements have proven that typical exhaust gases can be discriminated in backgrounds with 0%, 10% and 20% oxygen. Furthermore, we are able to quantify the mentioned gases and to determine unknown concentrations based on training data. Very low levels of relative humidity (r.h.) below a few percent influence the sensor response considerably but for higher levels the cross interference of humidity is negligible. In addition, experiments regarding stability and reproducibility were performed.

Place, publisher, year, edition, pages
2014. 1-9 p.
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-113326OAI: oai:DiVA.org:liu-113326DiVA: diva2:781236
Conference
E-MRS 2014, Lille, France, May 26-30
Available from: 2015-01-15 Created: 2015-01-15 Last updated: 2015-01-22

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Bur, ChristianAndersson, MikeLloyd Spetz, Anita

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