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Thermal stability of epitaxial cubic-TiN/(Al,Sc)N metal/semiconductor superlattices
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Purdue University, IN 47907 USA; Purdue University, IN 47907 USA.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Helmholtz Zentrum Geesthacht, Germany.
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2015 (English)In: Journal of Materials Science, ISSN 0022-2461, E-ISSN 1573-4803, Vol. 50, no 8, 3200-3206 p.Article in journal (Refereed) Published
Abstract [en]

We report on the thermal stability of epitaxial cubic-TiN/(Al,Sc)N metal/semiconductor superlattices with the rocksalt crystal structure for potential plasmonic, thermoelectric, and hard coating applications. TiN/Al0.72Sc0.28N superlattices were annealed at 950 and 1050 A degrees C for 4, 24, and 120 h, and the thermal stability was characterized by high-energy synchrotron-radiation-based 2D X-ray diffraction, high-resolution (scanning) transmission electron microscopy [HR(S)/TEM], and energy dispersive X-ray spectroscopy (EDX) mapping. The TiN/Al0.72Sc0.28N superlattices were nominally stable for up to 4 h at both 950 and 1050 A degrees C. Further annealing treatments for 24 and 120 h at 950 A degrees C led to severe interdiffusion between the layers and the metastable cubic-Al0.72Sc0.28N layers partially transformed into Al-deficient cubic-(Al,Sc)N and the thermodynamically stable hexagonal wurtzite phase with a nominal composition of AlN (h-AlN). The h-AlN grains displayed two epitaxial variants with respect to c-TiN and cubic-(Al,Sc)N. EDX mapping suggests that scandium has a higher tendency for diffusion in TiN/(Al,Sc)N than titanium or aluminum. Our results indicate that the kinetics of interdiffusion and the cubic-to-hexagonal phase transformation place constraints on the design and implementation of TiN/(Al,Sc)N superlattices for high-temperature applications.

Place, publisher, year, edition, pages
Springer Verlag (Germany) , 2015. Vol. 50, no 8, 3200-3206 p.
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Physical Sciences
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URN: urn:nbn:se:liu:diva-116502DOI: 10.1007/s10853-015-8884-5ISI: 000349969800021OAI: oai:DiVA.org:liu-116502DiVA: diva2:798991
Note

Funding Agencies|Linkoping University; Swedish Research Council [2011-6505]; National Science Foundation; US Department of Energy [CBET-1048616]

Available from: 2015-03-27 Created: 2015-03-27 Last updated: 2017-12-04

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Schroeder, JeremyGarbrecht, MagnusBirch, Jens

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