Impact of AlGaN/GaN interface sharpness on HEMT performance
(English)Manuscript (preprint) (Other academic)
The impact of the design and sharpness of the AlGaN/GaN interface in GaN-based HEMTs is investigated. Three structures with different AlGaN/GaN interface properties were grown with hot-wall MOCVD. One structure has a 2-nmthick AlN exclusion layer in between the AlGaN and the GaN, while the other two differ in their sharpness of the Al transition at the AlGaN/GaN interface. The structures with AlN exclusion layer and optimized sharpness of the interface show similar electron mobilities (1760 and 1740 cm2/Vs). HEMTs were processed and evaluated. Gated Hall-measurements indicate that the sharper interface maintains a higher mobility when the electrons are close to the interface compared both to the AlNexclusion layer and the non-optimized structure. The higher mobility manifests as lower parasitic resistance yielding better DC and high frequency performance. Pulsed IV measurements indicate that the sharper interface provide less dispersive effects compared both to the AlN exclusion layer and the optimized interface.
GaN HEMT, AlGaN/GaN interface, sharpness
IdentifiersURN: urn:nbn:se:liu:diva-117137OAI: oai:DiVA.org:liu-117137DiVA: diva2:805920