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Sputter-cleaned Epitaxial VxMo(1-x)Ny/MgO(001) Thin Films Analyzed by X-ray Photoelectron Spectroscopy: 2. Single-crystal V0.47Mo0.53N0.92
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. (Thin Film Physics)ORCID iD: 0000-0002-4898-5115
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. (Thin Film Physics)
University of Illinois, Urbana, Illinois, USA.
University of Illinois, Urbana, Illinois.
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2013 (English)In: Surface Science Spectra, ISSN 1055-5269, E-ISSN 1520-8575, Vol. 20, 74-79 p.Article in journal (Refereed) Published
Abstract [en]

Epitaxial Vx Mo (1-x)Ny thin films grown by ultrahigh vacuum reactive magnetron sputter deposition on MgO(001) substrates are analyzed by x-ray photoelectron spectroscopy (XPS). This contribution presents analytical results for 300-nm-thick single-crystal V0.47 Mo 0.53N0.92/MgO(001) films deposited by reactive cosputtering from V (99.95% purity) and Mo (99.95% purity) targets. Film growth is carried out in a UHV chamber with base pressure 2 × 10−9 Torr at 700 °C in mixed Ar/N2 atmospheres at a total pressure of 5 mTorr, with a N2 partial pressure of 3.2 mTorr; a bias of −30 V is applied to the substrate. Films composition is determined by Rutherford backscattering spectrometry (RBS). XPS measurements employ monochromatic Al K α radiation (hν = 1486.6 eV) to analyze V0.47 Mo 0.53N0.92(001) surfaces sputter-cleaned in-situ with 4 keV Ar+ ions incident at an angle of 70° with respect to the surface normal. XPS results show that the ion-etched sample surfaces have no measurable oxygen or carbon contamination; film composition, obtained using XPS sensitivity factors, is V0.34 Mo 0.66N0.81. All core level peaks, including the nearby Mo 3p3/2 (binding energy of 394.1 eV) and N 1s (at 397.5 eV) peaks, are well-resolved. Comparison to the V0.48 Mo 0.52N0.64 single-crystal film, submitted separately to Surface Science Spectra, indicates that with decreasing growth temperature from 900 to 700 °C (and increasing nitrogen concentration in Vx Mo (1-x)Ny from y = 0.64 to 0.81) the N 1s core level peak shifts towards lower binding energy by 0.1 eV while all metal atom peaks move in the opposite direction by the same amount.

Place, publisher, year, edition, pages
2013. Vol. 20, 74-79 p.
National Category
Condensed Matter Physics
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URN: urn:nbn:se:liu:diva-118604DOI: 10.1116/11.20130601OAI: oai:DiVA.org:liu-118604DiVA: diva2:815875
Available from: 2015-06-02 Created: 2015-06-02 Last updated: 2017-12-04Bibliographically approved

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Greczynski, GrzegorzKindlund, HannaPetrov, IvanGreene, Joseph EHultman, Lars

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