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Sputter-cleaned Epitaxial VxMo(1-x)Ny/MgO(001)Thin Films Analyzed by X-ray PhotoelectronSpectroscopy: 3. Polycrystalline V0.49Mo0.51N1.02
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. (Thin Film Physics)ORCID iD: 0000-0002-4898-5115
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. (Thin Film Physics)
University of Illinois, Materials Science Department and Frederick Seitz Materials Research.
University of Illinois, Materials Science Department and Frederick Seitz Materials Research.
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2013 (English)In: Surface Science Spectra, ISSN 1055-5269, E-ISSN 1520-8575, Vol. 20, 80-85 p.Article in journal (Refereed) Published
Abstract [en]

Vx Mo (1-x)Ny thin films grown by ultrahigh vacuum reactive magnetron sputter deposition on MgO(001) substrates are analyzed by x-ray photoelectron spectroscopy (XPS). This contribution presents analytical results for 300-nm-thick 002-textured polycrystalline V0.49 Mo 0.51N1.02 films deposited by reactive cosputtering from V (99.95 % purity) and Mo (99.95 % purity) targets. Film growth is carried out at 500 °C in mixed Ar/N2 atmospheres at a total pressure of 5 mTorr, with a N2 partial pressure of 3.2 mTorr; a bias of −30 V is applied to the substrate. Films composition is determined by Rutherford backscattering spectrometry (RBS). XPS measurements employ monochromatic Al K α radiation (hν = 1486.6 eV) to analyze V0.49 Mo 0.51N1.02 surface sputter-cleaned in-situ with 4 keV Ar+ ions incident at an angle of 70° with respect to the surface normal. XPS results show that the ion-etched sample surfaces have no measurable oxygen or carbon contamination; film composition, obtained using XPS sensitivity factors, is V0.34 Mo 0.66N1.00. All core level peaks, including the nearby Mo 3p3/2 (binding energy of 394.3 eV) and N 1s (at 397.4 eV) peaks, are well-resolved. Comparison to V0.33 Mo 0.67N0.64 and V0.34 Mo 0.66N0.81 single-crystal film surfaces, submitted separately to Surface Science Spectra, indicates that with decreasing growth temperature from 900 to 700 and 500 °C (and increasing nitrogen concentration in Vx Mo (1-x)Ny from y = 0.64 to 0.81 and 1.00) the N 1s core level peak shifts from 397.6 eV to 397.5 eV to 397.4 eV while metal atom peaks move towards higher binding energy by 0.2-0.4 eV.

Place, publisher, year, edition, pages
2013. Vol. 20, 80-85 p.
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Condensed Matter Physics
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URN: urn:nbn:se:liu:diva-118605DOI: 10.1116/11.20130602OAI: oai:DiVA.org:liu-118605DiVA: diva2:815877
Available from: 2015-06-02 Created: 2015-06-02 Last updated: 2017-12-04Bibliographically approved

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Greczynski, GrzegorzKindlund, HannaPetrov, IvanGreene, Joseph EHultman, Lars

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