liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Beware of poor-quality MgO substrates: A study of MgO substrate quality and its effect on thin film quality
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
2015 (English)In: Journal of Crystal Growth, ISSN 0022-0248, E-ISSN 1873-5002, Vol. 420, 22-31 p.Article in journal (Refereed) Published
Abstract [en]

Magnesium oxide (MgO) substrates are widely used for fundamental research of a large variety of materials. Our motivation is to make the research community aware of poor-quality MgO substrates. We acquired thirty MgO substrates from six different vendors and demonstrate that single-crystal MgO substrates are not always single crystal, but can consist of multiple domains. These multiple-domain MgO substrates can have a significant impact on research results as demonstrated by a one-to-one correlation between the domain structure of MgO substrates and titanium nitride (TiN) thin films (i.e. poor-quality MgO substrates result in poor-quality TiN films). Poor-quality MgO substrates are shown to be a widespread problem with over 70% of the evaluated substrates exhibiting multiple domains, essentially disqualifying them as substrates for epitaxy. MgO substrate vendors and researchers are encouraged to work together to resolve the problem of inconsistent MgO substrate quality and the research community is encouraged to perform quality control of MgO substrates prior to thin film deposition. Quality control by vendors and/or researchers can be achieved by acquiring X-ray diffraction omega-phi maps in batch processes, as detailed in this paper. We also propose a simple quality grading system to differentiate MgO substrates of varying quality.

Place, publisher, year, edition, pages
Elsevier , 2015. Vol. 420, 22-31 p.
Keyword [en]
Characterization; Crystal morphology; High resolution X-ray diffraction; Substrates; Solid phase epitaxy; Magnesium oxide
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-118838DOI: 10.1016/j.jcrysgro.2015.03.010ISI: 000353825100005OAI: oai:DiVA.org:liu-118838DiVA: diva2:818172
Note

Funding Agencies|Linkoping University; Swedish Research Council (the RAC Frame Program) [2011-6505]; Linnaeus Grant (LiLi-NFM); European Research Council under the European Community Seventh Framework Program/ERC Grant [258509]; Knut and Alice Wallenberg (KAW) Fellowship program

Available from: 2015-06-08 Created: 2015-06-04 Last updated: 2015-06-08

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Schroeder, JeremyIngason, Arni SigurdurRosén, JohannaBirch, Jens
By organisation
Thin Film PhysicsThe Institute of Technology
In the same journal
Journal of Crystal Growth
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 370 hits
ReferencesLink to record
Permanent link

Direct link