Structural and compositional evolutions of InxAl1-xN core-shell nanorods grown on Si(111) substrates by reactive magnetron sputter epitaxy
2015 (English)In: Nanotechnology, ISSN 0957-4484, E-ISSN 1361-6528, Vol. 26, no 21, 215602- p.Article in journal (Refereed) Published
Catalystless growth of InxAl1-xN core-shell nanorods have been realized by reactive magnetron sputter epitaxy onto Si(111) substrates. The samples were characterized by scanning electron microscopy, x-ray diffraction, scanning transmission electron microscopy, and energy dispersive x-ray spectroscopy. The composition and morphology of InxAl1-xN nanorods are found to be strongly influenced by the growth temperature. At lower temperatures, the grown materials form well-separated and uniform core-shell nanorods with high In-content cores, while a deposition at higher temperature leads to the formation of an Al-rich InxAl1-xN film with vertical domains of low In-content as a result of merging Al-rich shells. The thickness and In content of the cores (domains) increase with decreasing growth temperature. The growth of the InxAl1-xN is traced to the initial stage, showing that the formation of the core-shell nanostructures starts very close to the interface. Phase separation due to spinodal decomposition is suggested as the origin of the resultant structures. Moreover, the in-plane crystallographic relationship of the nanorods and substrate was modified from a fiber textured to an epitaxial growth with an epitaxial relationship of InxAl1-xN//Si and InxAl1-xN[11 (2) over bar0]//Si[1 (1) over bar0] by removing the native SiOx layer from the substrate.
Place, publisher, year, edition, pages
IOP Publishing: Hybrid Open Access , 2015. Vol. 26, no 21, 215602- p.
InAlN; core-shell; nanorods; sputtering; MSE; STEM; EDX
IdentifiersURN: urn:nbn:se:liu:diva-118979DOI: 10.1088/0957-4484/26/21/215602ISI: 000354598800010PubMedID: 25944838OAI: oai:DiVA.org:liu-118979DiVA: diva2:818179
Funding Agencies|Swedish Research Council (VR) [621-2012-4420]; Swedish Governmental Agency for Innovation Systems (VINNOVA) under the VINNMER international qualification program; Knut and Alice Wallenberg Foundation2015-06-082015-06-052016-08-31