Thermal behavior of irradiation-induced-deep levels in bulk GaN
2015 (English)Manuscript (preprint) (Other academic)
Bulk GaN grown by halide vapor phase epitaxy and irradiated by 2 MeV electrons at a fluence of 5×1016 cm-2 were studied by deep level transient spectroscopy. After irradiation, two new peaks labelled D0 (EC – 0.18 eV) and D1 (EC – 0.13 eV) are observed. From isochronal annealing studies in the temperature range of 350 - 600 K, it is observed that peak D0 is completely annealed out already at 550 K while the broad peak D1 has a more complex annealing behavior. The concentration of D1 is decreasing during annealing and its peak position is shifted to higher temperatures, until a relatively stable peak labelled D2 (EC – 0.24 eV) is formed. From an isothermal annealing study of D2, it is concluded that the annealing process can be described by a first order annealing process with an activation energy and prefactor of 1.2 eV and 6.6 × 105 s-1, respectively. From the large pre-factor it is concluded that the annihilation of D2 is governed by a long-range migration process. From its annealing behavior, it is suggested that trap D2 may be related to the VGa.
Place, publisher, year, edition, pages
Deep level, GaN, DLTS, irradiation
IdentifiersURN: urn:nbn:se:liu:diva-121708OAI: oai:DiVA.org:liu-121708DiVA: diva2:858377