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Are the argon metastables important in high power impulse magnetron sputtering discharges?
KTH Royal Institute Technology, Sweden; University of Iceland, Iceland.
University of Paris 11, France.
CentraleSupelec, France; CNRS, France.
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering. KTH Royal Institute Technology, Sweden.
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2015 (English)In: Physics of Plasmas, ISSN 1070-664X, E-ISSN 1089-7674, Vol. 22, no 11, 113508- p.Article in journal (Refereed) Published
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Abstract [en]

We use an ionization region model to explore the ionization processes in the high power impulse magnetron sputtering (HiPIMS) discharge in argon with a titanium target. In conventional dc magnetron sputtering (dcMS), stepwise ionization can be an important route for ionization of the argon gas. However, in the HiPIMS discharge stepwise ionization is found to be negligible during the breakdown phase of the HiPIMS pulse and becomes significant (but never dominating) only later in the pulse. For the sputtered species, Penning ionization can be a significant ionization mechanism in the dcMS discharges, while in the HiPIMS discharge Penning ionization is always negligible as compared to electron impact ionization. The main reasons for these differences are a higher plasma density in the HiPIMS discharge, and a higher electron temperature. Furthermore, we explore the ionization fraction and the ionized flux fraction of the sputtered vapor and compare with recent experimental work. (C) 2015 AIP Publishing LLC.

Place, publisher, year, edition, pages
AMER INST PHYSICS , 2015. Vol. 22, no 11, 113508- p.
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Physical Sciences
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URN: urn:nbn:se:liu:diva-123815DOI: 10.1063/1.4935402ISI: 000366054900078OAI: oai:DiVA.org:liu-123815DiVA: diva2:892900
Note

Funding Agencies|Icelandic Research Fund [130029-053]; Swedish Government Agency for Innovation Systems (VINNOVA) [2014-04876]; Belgian Government through the Pole dAttraction Interuniversitaire (PAI) [P7/34]

Available from: 2016-01-11 Created: 2016-01-11 Last updated: 2017-12-01

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Brenning, Nils

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