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LTCC, new packaging approach for toxic gas and particle detection
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, Faculty of Science & Engineering. Microelectronics and Material Physics Laboratories, University of Oulu, Finland.ORCID iD: 0000-0002-2817-3574
Microelectronics and Material Physics Laboratories, University of Oulu, Finland.
Microelectronics and Material Physics Laboratories, University of Oulu, Finland.
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, Faculty of Science & Engineering.
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2015 (English)In: Procedia Engineering, ISSN 1877-7058, E-ISSN 1877-7058, Vol. 120, 484-487 p.Article in journal (Refereed) Published
Abstract [en]

Packaging of chemical sensors is still an area, which is not much explored. Low temperature co-fired ceramic, LTCC, packaging offers large advantages in terms of 3D design, integration of advanced functionality and fast processing. SiC based FET gas sensors are possible to integrate directly in the LTCC co-firing process at 850 °C, whereby both high temperature and other advanced applications like ultra-low detection of toxic gases are greatly improved. The LTCC packaging is also used for development of particle detectors as well as packaging for an electrical method to detect toxic effect on cells by particles.

Place, publisher, year, edition, pages
Elsevier, 2015. Vol. 120, 484-487 p.
Keyword [en]
LTCC technology;SiC-FET gas sensors;particle sensors;cell-clinic
National Category
Physical Sciences Other Chemical Engineering
Identifiers
URN: urn:nbn:se:liu:diva-124050DOI: 10.1016/j.proeng.2015.08.677ISI: 000380499300110OAI: oai:DiVA.org:liu-124050DiVA: diva2:895397
Available from: 2016-01-18 Created: 2016-01-18 Last updated: 2017-11-30Bibliographically approved

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Lloyd Spetz, AnitaPuglisi, DonatellaAndersson, Mike

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