LTCC, new packaging approach for toxic gas and particle detection
2015 (English)In: Procedia Engineering, ISSN 1877-7058, E-ISSN 1877-7058, Vol. 120, 484-487 p.Article in journal (Refereed) Published
Packaging of chemical sensors is still an area, which is not much explored. Low temperature co-fired ceramic, LTCC, packaging offers large advantages in terms of 3D design, integration of advanced functionality and fast processing. SiC based FET gas sensors are possible to integrate directly in the LTCC co-firing process at 850 °C, whereby both high temperature and other advanced applications like ultra-low detection of toxic gases are greatly improved. The LTCC packaging is also used for development of particle detectors as well as packaging for an electrical method to detect toxic effect on cells by particles.
Place, publisher, year, edition, pages
Elsevier, 2015. Vol. 120, 484-487 p.
LTCC technology;SiC-FET gas sensors;particle sensors;cell-clinic
Physical Sciences Other Chemical Engineering
IdentifiersURN: urn:nbn:se:liu:diva-124050DOI: 10.1016/j.proeng.2015.08.677ISI: 000380499300110OAI: oai:DiVA.org:liu-124050DiVA: diva2:895397