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Pulsed laser deposition of metal oxide nanoparticles, agglomerates, and nanotrees for chemical sensors
Microelectronics and Material Physics Laboratories, University of Oulu, Finland.
Microelectronics and Material Physics Laboratories, University of Oulu, Finland.
Microelectronics and Material Physics Laboratories, University of Oulu.
Department of Mechatronics, Saarland University, Germany.
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2015 (English)In: Procedia Engineering, ISSN 1877-7058, E-ISSN 1877-7058, Vol. 120, 1158-1161 p.Article in journal (Refereed) Published
Abstract [en]

Pulsed laser deposition (PLD) was used to prepare WO3, ZnO-modified SnO2, and V2O5 nanostructures as gas sensing materials on top of commercial SGX Sensortech MEMS microheater platforms. The layers were formed of different types of nanostructures including nanoparticles, agglomerates, and nanotrees with fractal-like growth. Clear dependency between the deposition parameters, structural morphology, and gas sensing performance was found. The sensing materials were found to be sensitive to different types of gaseous species, so that WO3 and SnO2 had very good response up to 600% to 50 ppm NO, and V2O5 up to -35% to 20 ppm NH3, respectively.

Place, publisher, year, edition, pages
Procedia Engineering , 2015. Vol. 120, 1158-1161 p.
Keyword [en]
Pulsed Laser Deposition;Metal Oxide;Gas Sensor;Nanoparticle;Nanotree
National Category
Physical Sciences Other Chemistry Topics
Identifiers
URN: urn:nbn:se:liu:diva-124052DOI: 10.1016/j.proeng.2015.08.745ISI: 000380499300268OAI: oai:DiVA.org:liu-124052DiVA: diva2:895404
Available from: 2016-01-19 Created: 2016-01-19 Last updated: 2017-11-30Bibliographically approved

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Lloyd Spetz, Anita

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