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Exploring the gas sensing performance of catalytic metal/ metal oxide 4H-SiC field effect transistors
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. (Applied Sensor Science)
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. (Applied Sensor Science)
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. (Applied Sensor Science)
University of Oulu, Finland. (Microelectronics and Material Physics Laboratories)
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2016 (English)In: Materials Science Forum, ISSN 0255-5476, E-ISSN 1662-9752, Vol. 858, 997-1000 p.Article in journal (Refereed) Published
Abstract [en]

Gas sensitive metal/metal-oxide field effect transistors based on silicon carbide were used to study the sensor response to benzene (C6H6) at the low parts per billion (ppb) concentration range. A combination of iridium and tungsten trioxide was used to develop the sensing layer. Highsensitivity to 10 ppb C6H6 was demonstrated during several repeated measurements at a constant temperature from 180 to 300 °C. The sensor performance was studied also as a function of the electrical operating point of the device, i.e., linear, onset of saturation, and saturation mode. Measurements performed in saturation mode gave a sensor response up to 52 % higher than those performed in linear mode.

Place, publisher, year, edition, pages
Trans Tech Publications Inc., 2016. Vol. 858, 997-1000 p.
Keyword [en]
Field Effect Transistor, Gas Sensor, Iridium/Tungsten Trioxide, Benzene, 4H-SiC
National Category
Environmental Engineering
Identifiers
URN: urn:nbn:se:liu:diva-124153DOI: 10.4028/www.scientific.net/MSF.858.997OAI: oai:DiVA.org:liu-124153DiVA: diva2:895918
Conference
16th International Conference on Silicon Carbide and Related Materials, Giardini Naxos, Italy, October 4 - 9, 2015
Projects
SENSIndoor, www.sensindoor.eu
Funder
EU, FP7, Seventh Framework Programme, 604311
Available from: 2016-01-20 Created: 2016-01-20 Last updated: 2016-05-16

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Puglisi, DonatellaEriksson, JensAndersson, MikeLloyd Spetz, Anita
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Applied Sensor ScienceDepartment of Physics, Chemistry and BiologyFaculty of Science & Engineering
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