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Generation of super-size macroparticles in a direct current vacuum arc discharge from a Mo-Cu cathode
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
PLANSEE Composite Mat GmbH, Germany.
PLANSEE Composite Mat GmbH, Germany.
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2016 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 108, no 5, 054103- p.Article in journal (Refereed) PublishedText
Abstract [en]

An inherent property of cathodic arc is the generation of macroparticles, of a typical size ranging from submicrometer up to a few tens of mu m. In this work, we have studied macroparticle generation from a Mo0.78Cu0.22 cathode used in a dc vacuum arc discharge, and we present evidence for super-size macroparticles of up to 0.7mm in diameter. All analyzed particles are found to be rich in Mo (>= 98 at. %). The particle generation is studied by visual observation of the cathode surface during arcing, by analysis of composition and geometrical features of the used cathode surface, and by examination of the generated macroparticles with respect to shape and composition. A mechanism for super-size macroparticle generation is suggested based on observed segregated layers of Mo and Cu identified in the topmost part of the cathode surface, likely due to the discrepancy in melting and evaporation temperatures of Mo and Cu. The results are of importance for increasing the fundamental understanding of macroparticle generation, which in turn may lead to increased process control and potentially provide paths for tuning, or even mitigating, macroparticle generation. (C) 2016 AIP Publishing LLC.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2016. Vol. 108, no 5, 054103- p.
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-127583DOI: 10.1063/1.4941412ISI: 000373055700077OAI: oai:DiVA.org:liu-127583DiVA: diva2:925993
Note

Funding Agencies|European Research Council under the European Community Seventh Framework Program/ERC Grant [258509]; Swedish Research Council (VR) [642-2013-8020, 621-2012-4425]; KAW Fellowship program; SSF synergy Grant FUNCASE

Available from: 2016-05-03 Created: 2016-05-03 Last updated: 2016-05-03

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Zhirkov, IgorPetruhins, AndrejsRosén, Johanna
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