Development of dry state on-chip microactuators based on polypyrrole
2016 (English)Conference paper, Poster (Refereed)
We have developed a microfabrication process to fabricate on-chip microactuators that can operate outside of a liquid electrolyte. The on-chip microactuators were fabricated using standard photolithographic techniques and wet etching, combined with special design processing to micropattern polypyrrole. By immobilizing a UV-patternable gel containing a liquid electrolyte on top of the electroactive polypyrrole layer, actuation in air is achieved. The result shows the possibility to fabricate complex microsystems such as microrobotics and micromanipulators based on these dry state on-chip microactuators.
Place, publisher, year, edition, pages
Textile, Rubber and Polymeric Materials
IdentifiersURN: urn:nbn:se:liu:diva-128671OAI: oai:DiVA.org:liu-128671DiVA: diva2:931453
Micronano System Workshop MSW 2016. May 17-18, 2016, Lund
FunderEU, Horizon 2020, 641822Swedish Research Council, 2014-3079