Fabrication of polypyrrole based dry state on-chip microactuators
2016 (English)Conference paper, Poster (Refereed)
We have developed a microfabrication process to fabricate on-chip microactuators that can work in open air. The on-chip microactuators were fabricated using standard photolithographic techniques and wet etching, combined with special design processing to micropattern polypyrrole. By patterning a UV-polymerizable gel containing a liquid electrolyte on top of the electroactive polypyrrole layer, actuation in air is achieved. The resulting microactuators were able to move, although with reduced movement which we contribute to poor ionic conductivity. Further optimization of the processing is currently on-going. The result shows the possibility to fabricate complex microsystems such as microrobotics and micromanipulators based on these dry state on-chip microactuators.
Place, publisher, year, edition, pages
Textile, Rubber and Polymeric Materials
IdentifiersURN: urn:nbn:se:liu:diva-128674OAI: oai:DiVA.org:liu-128674DiVA: diva2:931471
EuroEAP 2016 Sixth international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles. 14-15 June 2016, Helsingør, Denmark