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Fabrication of polypyrrole based dry state on-chip microactuators
Linköping University, Department of Physics, Chemistry and Biology, Biosensors and Bioelectronics. Linköping University, Faculty of Science & Engineering.
Linköping University, Faculty of Science & Engineering. Linköping University, Department of Physics, Chemistry and Biology, Biosensors and Bioelectronics.
Linköping University, Department of Physics, Chemistry and Biology, Biosensors and Bioelectronics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-2071-7768
2016 (English)Conference paper, Poster (with or without abstract) (Refereed)
Abstract [en]

We have developed a microfabrication process to fabricate on-chip microactuators that can work in open air. The on-chip microactuators were fabricated using standard photolithographic techniques and wet etching, combined with special design processing to micropattern polypyrrole. By patterning a UV-polymerizable gel containing a liquid electrolyte on top of the electroactive polypyrrole layer, actuation in air is achieved. The resulting microactuators were able to move, although with reduced movement which we contribute to poor ionic conductivity. Further optimization of the processing is currently on-going. The result shows the possibility to fabricate complex microsystems such as microrobotics and micromanipulators based on these dry state on-chip microactuators.

Place, publisher, year, edition, pages
2016.
National Category
Textile, Rubber and Polymeric Materials
Identifiers
URN: urn:nbn:se:liu:diva-128674OAI: oai:DiVA.org:liu-128674DiVA: diva2:931471
Conference
EuroEAP 2016 Sixth international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles. 14-15 June 2016, Helsingør, Denmark
Available from: 2016-05-27 Created: 2016-05-27 Last updated: 2016-06-13

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