liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Investigation of Low Doped n-Type and p-Type 3C-SiC Layers Grown on 6H-SiC Substrates by Sublimation Epitaxy
Groupe d’Etudes des Semiconducteurs, Université Montpellier 2 and CNRS, cc 074‐GES, 34095 Montpellier Cedex 5, France.
Groupe d’Etudes des Semiconducteurs, Université Montpellier 2 and CNRS, cc 074‐GES, 34095 Montpellier Cedex 5, France.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
Show others and affiliations
2010 (English)In: Silicon Carbide and Related Materials 2009, 2010, Vol. 645, 179-182 p.Conference paper (Refereed)Text
Abstract [en]

Both, n-type and p-type 3C-SiC samples grown on 6H-SiC substrates by sublimation epitaxy have been investigated. From low temperature photoluminescence studies, we demonstrate a low level of residual (n and/or p-type) doping with weak compensation, which is confirmed by secondary ion mass spectroscopy in the case of p-type samples.

Place, publisher, year, edition, pages
2010. Vol. 645, 179-182 p.
Series
, Materials Science Forum
Keyword [en]
Epitaxial Growth, Low Temperature Photoluminescence
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-128857DOI: 10.4028/www.scientific.net/MSF.645-648.179OAI: oai:DiVA.org:liu-128857DiVA: diva2:932657
Conference
Silicon Carbide and Related Materials 2009
Available from: 2016-06-02 Created: 2016-06-02 Last updated: 2016-06-20

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Sun, Jian WuBeshkova, MilenaVasiliauskas, RemigijusSyväjärvi, MikaelYakimova, Rositsa
By organisation
Semiconductor MaterialsFaculty of Science & Engineering
Condensed Matter Physics

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 10 hits
ReferencesLink to record
Permanent link

Direct link