Structural and Optical Investigation of VLS Grown (111) 3C-SiC Layers on 6H-SiC Substrates in Sn-Based Melts
2011 (English)In: Silicon Carbide and Related Materials 2010, 2011, Vol. 679, 165-168 p.Conference paper (Refereed)Text
The current communication focuses on the investigation of 3C-SiC layers grown by the Vapour-Liquid-Solid mechanism on on-axis Si-face 6H-SiC substrates in SiSn melts with different compositions and at different growth temperatures. The layers are studied by Transmission Electron Microscopy and Low Temperature Photoluminescence. It was found that for melts with Sn concentration higher than 60 at% large Sn-related precipitates are formed. The depth distribution of the Sn precipitates strongly depends not only on the melt composition but also on the growth temperature. Their formation strongly influences the stacking fault density and the dopant incorporation in the layers. Lower Sn concentrations combined with higher growth temperatures should result in 3C-SiC layer with enhanced structural quality.
Place, publisher, year, edition, pages
2011. Vol. 679, 165-168 p.
, Materials Science Forum
3C-SiC, VLS, Sn Precipitates, TEM, Defect
Condensed Matter Physics Inorganic Chemistry
IdentifiersURN: urn:nbn:se:liu:diva-128856DOI: 10.4028/www.scientific.net/MSF.679-680.165OAI: oai:DiVA.org:liu-128856DiVA: diva2:932659
Silicon Carbide and Related Materials 2010