liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Low Temperature Photoluminescence Investigation of 3-Inch SiC Wafers for Power Device Applications
Université Montpellier 2, Laboratoire Charles Coulomb UMR 5221, F-34095, Montpellier, France.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering. Groupe d’Etudes des Semiconducteurs, Université Montpellier 2 and CNRS, cc 074‐GES, 34095 Montpellier Cedex 5, France.
Université Montpellier 2, Laboratoire Charles Coulomb UMR 5221, F-34095, Montpellier, France.
Université Montpellier 2, Laboratoire Charles Coulomb UMR 5221, F-34095, Montpellier, France.
Show others and affiliations
2012 (English)In: HeteroSiC & WASMPE 2011, 2012, Vol. 711, 164-168 p.Conference paper (Refereed)Text
Abstract [en]

Focusing on the change in aluminium-related photoluminescence lines in 4H-SiC versus doping concentration, we have used a combination of LTPL (Low Temperature PhotoLuminescence) and secondary ion mass spectrometry measurements to set new calibration curves. In this way, one can probe the change in aluminum concentration in the range 1017 to 1019 cm-3. When applied to LTPL maps collected on full 3-inch wafers, we show that such abacuses constitute a powerful tool to control efficiently the doping level of as-grown p+ (emitters) and p++ (contact) layers for power device applications.

Place, publisher, year, edition, pages
2012. Vol. 711, 164-168 p.
Series
, Materials Science Forum, ISSN 0255-5476
Keyword [en]
Hot-Wall CVD, Low Temperature Photoluminescence, Al Doping, 4H-SiC
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-128853DOI: 10.4028/www.scientific.net/MSF.711.164OAI: oai:DiVA.org:liu-128853DiVA: diva2:932662
Conference
HeteroSiC & WASMPE 2011
Available from: 2016-06-02 Created: 2016-06-02 Last updated: 2016-06-21

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Sun, JianwuUl-Hassan, JawadHenry, Anne
By organisation
Semiconductor MaterialsFaculty of Science & EngineeringThin Film Physics
Other Electrical Engineering, Electronic Engineering, Information EngineeringCondensed Matter Physics

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 4 hits
ReferencesLink to record
Permanent link

Direct link