Energy harvesting using piezoelectric nanomaterials provides an opportunity for advancement towards self-powered systems. Self-powered systems are a new emerging technology, which allows the use of a system or a device that perform a function without the need for external power source like for example, a battery or any other type of source. This technology can for example use harvested energy from sources around us such as ambient mechanical vibrations, noise, and human movement, etc. and convert it to electric energy using the piezoelectric effect. For nanoscale devices, the size of traditional batteries is not suitable and will lead to loss of the concept of “nano”. This is due to the large size and the relatively large magnitude of the delivered power from traditional sources. The development of a nanogenerator (NG) to convert energy from the environment into electric energy would facilitate the development of some self-powered systems relying on nano- devices.

The main objective of this thesis is to fabricate a piezoelectric Zinc Oxide (ZnO) NGs for low frequency (˂ 100 Hz) energy harvesting applications. For that, different types of NGs based on ZnO nanostructures have been carefully developed, and studied for testing under different kinds of low frequency mechanical deformations. Well aligned ZnO nanowires (NWs) possessing high piezoelectric coefficient were synthesized on flexible substrates using the low temperature hydrothermal route. These ZnO NWs were then used in different configurations to demonstrate different low frequency energy harvesting devices.

Using piezoelectric ZnO NWs, we started with the fabrication of sandwiched NG for hand writing enabled energy harvesting device based on a thin silver layer coated paper substrate. Such device configurations can be used for the development of electronic programmable smart paper. Further, we developed this NG to work as a triggered sensor for wireless system using foot-step pressure. These studies demonstrate the feasibility of using ZnO NWs piezoelectric NG as a low-frequency self-powered sensor, with potential applications in wireless sensor networks. After that, we investigated and fabricated a sensor on PEDOT: PSS plastic substrate either by one side growth technique or by using double sided growth. For the first growth technique, the fabricated NG has been used as a sensor for acceleration system; while the fabricated NG by the second technique has worked as anisotropic directional sensor. This fabricated configurations showed stability for sensing and can be used in surveillance, security, and auto-mobil applications. In addition to that, we investigated the fabrication of a sandwiched NG on plastic substrates. Finally, we demonstrated that doping ZnO NWs with extrinsic element (such as Ag) will lead to the reduction of the piezoelectric effect due to the loss of crystal symmetry. A brief summary into future opportunities and challenges are also presented in the last chapter of this thesis.