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TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. University of Leoben, Austria.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-4898-5115
Mat Centre Leoben Forsch GmbH, Austria.
University of Leoben, Austria.
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2016 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 34, no 2, 022202-1-022202-8 p.Article in journal (Refereed) PublishedText
Abstract [en]

The authors investigate the interdiffusion damage of Cu/TiN stacks deposited on Si(001) substrates by low-temperature unbalanced direct current magnetron sputtering. Pristine and diffusion-annealed samples are examined by x-ray diffraction, four-point-probe resistivity measurements, scanning electron microscopy, energy-dispersive x-ray spectroscopy, and atom probe tomography. Two relevant diffusion processes are identified. The local diffusion of Cu through defects and grain boundaries in the TiN layer leads to the formation of the eta -Cu3Si phase at the barrier/substrate interface. Three-dimensional reconstructions obtained by atom probe tomography additionally reveal the outward diffusion of Si atoms from the substrate through the TiN bulk toward the Cu top layer, eventually also resulting in the formation of a discontinuous Cu3Si surface layer. (C) 2016 American Vacuum Society.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2016. Vol. 34, no 2, 022202-1-022202-8 p.
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-129679DOI: 10.1116/1.4942003ISI: 000376782200050OAI: oai:DiVA.org:liu-129679DiVA: diva2:942984
Note

Funding Agencies|Austrian Federal Government (Bundesministerium fur Verkehr, Innovation und Technologie); Austrian Federal Government (Bundesministerium fur Wirtschaft, Familie und Jugend); Styrian and the Tyrolean Provincial Government; Swedish Research Council [2013-4018]; Knut and Alice Wallenberg Foundation for the Ultra Electron Microscopy Laboratory at Linkoping University

Available from: 2016-06-27 Created: 2016-06-23 Last updated: 2016-08-31

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Muehlbacher, MarleneGreczynski, GrzegorzLu, JunHultman, Lars
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ReferencesLink to record
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