liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Properties of ScxAl1-xN (x=0.27) thin films on sapphire and silicon substrates upon high temperature loading
TU Wien, Austria.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-9140-6724
TU Wien, Austria.
TU Wien, Austria.
2016 (English)In: Microsystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems, ISSN 0946-7076, E-ISSN 1432-1858, Vol. 22, no 7, 1679-1689 p.Article in journal (Refereed) PublishedText
Abstract [en]

Scandium Aluminum Nitride thin films (ScxAl1-xN) are attracting more and more attention for micro-electromechanical systems (MEMS) because of significantly increased piezoelectric constants compared to pure AlN. This work provides a comprehensive study of thermal annealing effects on ScxAl1-xN (x = 27 %) films synthesized via DC magnetron sputter deposition at nominally unheated Silicon and Sapphire substrates. Compared to the "as deposited" state increasing c-axis orientation and crystalline quality upon annealing up to 1000 A degrees C of films with mixed crystallographic orientation is observed via X-ray diffraction and transmission electron microscopy based analyses. Also the piezoelectric coefficient d (33) of ScxAl1-xN on Si shows increasing values at enhanced annealing temperatures. However, the improved piezoelectric properties are accompanied by both increased leakage currents and loss tangent values.

Place, publisher, year, edition, pages
SPRINGER , 2016. Vol. 22, no 7, 1679-1689 p.
National Category
Inorganic Chemistry
URN: urn:nbn:se:liu:diva-130409DOI: 10.1007/s00542-015-2798-7ISI: 000379331500019OAI: diva2:952662
SPIE EUROPE Symposium on Microtechnologies
Available from: 2016-08-15 Created: 2016-08-05 Last updated: 2016-08-15

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Persson, Per O A
By organisation
Thin Film PhysicsFaculty of Science & Engineering
In the same journal
Microsystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems
Inorganic Chemistry

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 32 hits
ReferencesLink to record
Permanent link

Direct link