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  • 1.
    Edström, Daniel
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    A theoretical study of mass transport processes on TiN(001) and mechanical properties of TiN- and VN-based ternaries2014Licentiate thesis, comprehensive summary (Other academic)
    Abstract [en]

    This thesis concerns computer simulations, using classical molecular dynamics, of transport processes related to TiN(001) growth. It is motivated from the challenge to understand transport processes at the atomic scale responsible for crystal and film growth and their different growth modes. Not even the most advanced experimental techniques are capable of resolving the sub ps time and sub-Ångström length-scales required. TiN belongs to an important class of transition metal nitrides, and is chosen here as a model system for such fundamental studies of surface transport. The simulations show that on terraces, Ti adatoms exhibit much higher migration rates than N adatoms. For TiNx complexes, as x increases from 1 to 3, rotation becomes increasingly more prevalent than translation. This leads to surprisingly high mobilities of TiN2 trimers, higher than that of N adatoms. On islands, Ti adatoms experience a significant funneling effect, resulting in short residence times. TiN dimers and TiN2 trimers exhibit surprisingly high diffusivities and residence times even shorter than Ti adatoms. TiN3 trimers, however, are essentially stationary on both terraces and islands and serve as nucleation clusters. Overall, Ti adatoms and TiN2 trimers are the most efficient carriers of Ti and N atoms with and between TiN(001) surface layers. These results indicate that Ti/N flux ratios close to one promote layer-by-layer TiN(001) growth, whereas lower ratios result in surface roughening. Understanding of these phenomena enables experimentalists to tune  the growth processes to optimize material properties.

    In this thesis I also carry out theoretical calculations to investigate the role of configurational order on the metallic sublattice in relation to toughness enhancement. My studies set out from the recent understanding that the toughness of transition metal nitrides can be enhanced by tuning the valence electron concentration. My results show that ordered alloys exhibit lower resistance to shear deformations than disordered alloys, and higher resistance to tensile deformation. The lower resistance to shear deformations is explained by the formation of fully bonding electronic states perpendicular to the applied stress. Using the Pugh-Pettifor criterion, it is shown that while configurational order has an effect on the ductility of the material, this is primarily governed by the valence electron concentration.

    List of papers
    1. Dynamics of Ti, N, and TiNx (x=1-3) admolecule transport on TiN(001) surfaces
    Open this publication in new window or tab >>Dynamics of Ti, N, and TiNx (x=1-3) admolecule transport on TiN(001) surfaces
    Show others...
    2012 (English)In: Physical Review B. Condensed Matter and Materials Physics, ISSN 1098-0121, E-ISSN 1550-235X, Vol. 86, no 15, p. 155443-Article in journal (Refereed) Published
    Abstract [en]

    We use classical molecular dynamics and the modified embedded atom method formalism to investigate the dynamics of atomic-scale transport on a low-index model compound surface, TiN(001). Our simulations, totaling 0.25 mu s for each case study, follow the pathways and migration kinetics of Ti and N adatoms, as well as TiNx complexes with x = 1-3, which are known to contribute to the growth of TiN thin films by reactive deposition from Ti, N-2, and N precursors. The simulations are carried out at 1000 K, within the optimal range for TiN(001) epitaxial growth. We find Ti adatoms to be the highest-mobility species on TiN(001), with the primary migration path involving jumps of one nearest-neighbor distance d(NN) between adjacent fourfold hollow sites along in-plane andlt; 100 andgt; channels. Long jumps, 2d(NN), are also observed, but at much lower frequency. N adatoms, which exhibit significantly lower migration rates than Ti, diffuse along in-plane andlt; 110 andgt; directions and, when they intersect other N atoms, associatively form N-2 molecules, which desorb at kinetic rates. As expected, TiN and TiN3 complexes migrate at even lower rates with complex diffusion pathways involving rotations, translations, and rototranslations. TiN2 trimers, however, are shown to have surprisingly high diffusion rates, above that of N adatoms and almost half that of Ti adatoms. TiN3 motion is dominated by in-place rotation with negligible diffusion.

    Place, publisher, year, edition, pages
    American Physical Society, 2012
    National Category
    Engineering and Technology
    Identifiers
    urn:nbn:se:liu:diva-86129 (URN)10.1103/PhysRevB.86.155443 (DOI)000310130800008 ()
    Note

    Funding Agencies|Swedish Research Council (VR)|2008-6572|Swedish Government Strategic Research Area Grant in Materials Science|Mat-LiU 2009-00971|

    Available from: 2012-12-07 Created: 2012-12-07 Last updated: 2019-06-28
    2. Ti and N adatom descent pathways to the terrace from atop two-dimensional TiN/TiN(001) islands
    Open this publication in new window or tab >>Ti and N adatom descent pathways to the terrace from atop two-dimensional TiN/TiN(001) islands
    Show others...
    2014 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 558, p. 37-46Article in journal (Refereed) Published
    Abstract [en]

    We use classical molecular dynamics and the modified embedded atom method to determine residence times and descent pathways of Ti and N adatoms on square, single-atom-high, TiN islands on TiN(001). Simulations are carried out at 1000 K, which is within the optimal range for TiN(001) epitaxial growth. Results show that the frequency of descent events, and overall adatom residence times, depend strongly on both the TiN(001) diffusion barrier for each species as well as the adatom island-edge location immediately prior to descent. Ti adatoms, with a low diffusion barrier, rapidly move toward the island periphery, via funneling, where they diffuse along upper island edges. The primary descent mechanism for Ti adatoms is via push-out/exchange with Ti island-edge atoms, a process in which the adatom replaces an island edge atom by moving down while pushing the edge atom out onto the terrace to occupy an epitaxial position along the island edge. Double push-out events are also observed for Ti adatoms descending at N corner positions. N adatoms, with a considerably higher diffusion barrier on TiN(001), require much longer times to reach island edges and, consequently, have significantly longer residence times. N adatoms are found to descend onto the terrace by direct hopping over island edges and corner atoms, as well as by concerted push-out/exchange with N atoms adjacent to Ti corners. For both adspecies, we also observe several complex adatom/island interactions, before and after descent onto the terrace, including two instances of Ti islandatom ascent onto the island surface.

    Place, publisher, year, edition, pages
    Elsevier, 2014
    National Category
    Engineering and Technology
    Identifiers
    urn:nbn:se:liu:diva-91377 (URN)10.1016/j.tsf.2014.02.053 (DOI)000334314100006 ()
    Available from: 2013-04-23 Created: 2013-04-23 Last updated: 2019-06-28Bibliographically approved
    3. The dynamics of TiNx (x = 1 – 3) admolecule interlayer and intralayer transport on TiN/TiN(001) islands
    Open this publication in new window or tab >>The dynamics of TiNx (x = 1 – 3) admolecule interlayer and intralayer transport on TiN/TiN(001) islands
    Show others...
    2015 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 589, p. 133-144Article in journal (Refereed) Published
    Abstract [en]

    It has been shown both experimentally and by density functional theory calculations that the primary diffusing species during the epitaxial growth of TiN/TiN(001) are Ti and N adatoms together with TiNx complexes (x = 1, 2, 3), in which the dominant N-containing admolecule species depends upon the incident N/Ti flux ratio. Here, we employ classical molecular dynamics (CMD) simulations to probe the dynamics of TiNx (x = 1–3) admolecules on 8 × 8 atom square, single-atom-high TiN islands on TiN(001), as well as pathways for descent over island edges. The simulations are carried out at 1000 K, a reasonable epitaxial growth temperature. We find that despite their lower mobility on infinite TiN(001) terraces, both TiN and TiN2 admolecules funnel toward descending steps and are incorporated into island edges more rapidly than Ti adatoms. On islands, TiN diffuses primarily via concerted translations, but rotation is the preferred diffusion mechanism on infinite terraces. TiN2 migration is initiated primarily by rotation about one of the N admolecule atoms anchored at an epitaxial site. TiN admolecules descend from islands by direct hopping over edges and by edge exchange reactions, while TiN2 trimers descend exclusively by hopping. In contrast, TiN3 admolecules are essentially stationary and serve as initiators for local island growth. Ti adatoms are the fastest diffusing species on infinite TiN(001) terraces, but on small TiN/TiN(001) islands, TiN dimers provide more efficient mass transport. The overall results reveal the effect of the N/Ti precursor flux ratio on TiN(001) surface morphological evolution and growth modes.

    Place, publisher, year, edition, pages
    Elsevier, 2015
    Keywords
    Titanium nitride; Molecular dynamics; Film growth simulations; TiNx admolecule diffusion on TiN/TiN(001) islands; TiNx admolecule descent from TiN/TiN(001) islands
    National Category
    Physical Sciences
    Identifiers
    urn:nbn:se:liu:diva-111948 (URN)10.1016/j.tsf.2015.05.013 (DOI)000360320000023 ()
    Available from: 2014-11-11 Created: 2014-11-11 Last updated: 2019-06-28
    4. Effects of atomic ordering on the elastic properties of TiN- and VN-based ternary alloys
    Open this publication in new window or tab >>Effects of atomic ordering on the elastic properties of TiN- and VN-based ternary alloys
    2014 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 571, no Part 1, p. 145-153Article in journal (Refereed) Published
    Abstract [en]

    Improved toughness is one of the central goals in the development of wear-resistant coatings. Previous studies of toughness in transition metal nitride alloys have addressed the effects of chemical composition in these compounds. Herein, we use density functional theory to study the effects of various metal sublattice configurations, ranging from fully ordered to fully disordered, on the mechanical properties of VM2N and TiM2N (M2 = W, Mo) ternary alloys. Results show that all alloys display high incompressibility, indicating strong M-N bonds. Disordered atomic arrangements yield lower values of bulk moduli and C11 elastic constants, as well as higher values of C44 elastic constants, compared to ordered structures. We attribute the low C44 values of ordered structures to the formation of fully-bonding states perpendicular to the applied stress. We find that the ductility of these compounds is primarily an effect of the increased valence electron concentration induced upon alloying.

    Place, publisher, year, edition, pages
    Elsevier, 2014
    Keywords
    Nitrides, Density functional theory, Elastic properties, Ductility, Toughness
    National Category
    Physical Sciences
    Identifiers
    urn:nbn:se:liu:diva-111949 (URN)10.1016/j.tsf.2014.09.048 (DOI)000346053900024 ()
    Available from: 2014-11-11 Created: 2014-11-11 Last updated: 2019-06-28Bibliographically approved
  • 2.
    Edström, Daniel
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Sangiovanni, Davide G.
    Linköping University, Department of Physics, Chemistry and Biology, Theoretical Physics. Linköping University, The Institute of Technology.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Chirita, Valeriu
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Effects of atomic ordering on the elastic properties of TiN- and VN-based ternary alloys2014In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 571, no Part 1, p. 145-153Article in journal (Refereed)
    Abstract [en]

    Improved toughness is one of the central goals in the development of wear-resistant coatings. Previous studies of toughness in transition metal nitride alloys have addressed the effects of chemical composition in these compounds. Herein, we use density functional theory to study the effects of various metal sublattice configurations, ranging from fully ordered to fully disordered, on the mechanical properties of VM2N and TiM2N (M2 = W, Mo) ternary alloys. Results show that all alloys display high incompressibility, indicating strong M-N bonds. Disordered atomic arrangements yield lower values of bulk moduli and C11 elastic constants, as well as higher values of C44 elastic constants, compared to ordered structures. We attribute the low C44 values of ordered structures to the formation of fully-bonding states perpendicular to the applied stress. We find that the ductility of these compounds is primarily an effect of the increased valence electron concentration induced upon alloying.

  • 3.
    Edström, Daniel
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Sangiovanni, Davide
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Chirita, Valeriu
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Petrov, Ivan
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Department of Materials Science and the Fredrick Seitz Materials Research Laboratory, University of Illinois, Urbana, USA.
    Greene, Joseph
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Department of Materials Science and the Fredrick Seitz Materials Research Laboratory, University of Illinois, Urbana, USA.
    Ti and N adatom descent pathways to the terrace from atop two-dimensional TiN/TiN(001) islands2014In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 558, p. 37-46Article in journal (Refereed)
    Abstract [en]

    We use classical molecular dynamics and the modified embedded atom method to determine residence times and descent pathways of Ti and N adatoms on square, single-atom-high, TiN islands on TiN(001). Simulations are carried out at 1000 K, which is within the optimal range for TiN(001) epitaxial growth. Results show that the frequency of descent events, and overall adatom residence times, depend strongly on both the TiN(001) diffusion barrier for each species as well as the adatom island-edge location immediately prior to descent. Ti adatoms, with a low diffusion barrier, rapidly move toward the island periphery, via funneling, where they diffuse along upper island edges. The primary descent mechanism for Ti adatoms is via push-out/exchange with Ti island-edge atoms, a process in which the adatom replaces an island edge atom by moving down while pushing the edge atom out onto the terrace to occupy an epitaxial position along the island edge. Double push-out events are also observed for Ti adatoms descending at N corner positions. N adatoms, with a considerably higher diffusion barrier on TiN(001), require much longer times to reach island edges and, consequently, have significantly longer residence times. N adatoms are found to descend onto the terrace by direct hopping over island edges and corner atoms, as well as by concerted push-out/exchange with N atoms adjacent to Ti corners. For both adspecies, we also observe several complex adatom/island interactions, before and after descent onto the terrace, including two instances of Ti islandatom ascent onto the island surface.

  • 4.
    Edström, Daniel
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Sangiovanni, Davide
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Petrov, Ivan
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Department of Materials Science and the Fredrick Seitz Materials Research Laboratory, University of Illinois, Urbana, USA.
    Greene, Joseph
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Department of Materials Science and the Fredrick Seitz Materials Research Laboratory, University of Illinois, Urbana, USA.
    Chirita, Valeriu
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    The dynamics of TiNx (x = 1 – 3) admolecule interlayer and intralayer transport on TiN/TiN(001) islands2015In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 589, p. 133-144Article in journal (Refereed)
    Abstract [en]

    It has been shown both experimentally and by density functional theory calculations that the primary diffusing species during the epitaxial growth of TiN/TiN(001) are Ti and N adatoms together with TiNx complexes (x = 1, 2, 3), in which the dominant N-containing admolecule species depends upon the incident N/Ti flux ratio. Here, we employ classical molecular dynamics (CMD) simulations to probe the dynamics of TiNx (x = 1–3) admolecules on 8 × 8 atom square, single-atom-high TiN islands on TiN(001), as well as pathways for descent over island edges. The simulations are carried out at 1000 K, a reasonable epitaxial growth temperature. We find that despite their lower mobility on infinite TiN(001) terraces, both TiN and TiN2 admolecules funnel toward descending steps and are incorporated into island edges more rapidly than Ti adatoms. On islands, TiN diffuses primarily via concerted translations, but rotation is the preferred diffusion mechanism on infinite terraces. TiN2 migration is initiated primarily by rotation about one of the N admolecule atoms anchored at an epitaxial site. TiN admolecules descend from islands by direct hopping over edges and by edge exchange reactions, while TiN2 trimers descend exclusively by hopping. In contrast, TiN3 admolecules are essentially stationary and serve as initiators for local island growth. Ti adatoms are the fastest diffusing species on infinite TiN(001) terraces, but on small TiN/TiN(001) islands, TiN dimers provide more efficient mass transport. The overall results reveal the effect of the N/Ti precursor flux ratio on TiN(001) surface morphological evolution and growth modes.

  • 5.
    Edström, Daniel
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Sangiovanni, Davide
    Linköping University, Department of Physics, Chemistry and Biology, Theoretical Physics. Linköping University, Faculty of Science & Engineering.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Petrov, Ivan
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. University of Illinois, IL 61801 USA; University of Illinois, IL 61801 USA.
    Greene, Joseph E
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. University of Illinois, USA.
    Chirita, Valeriu
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Large-scale molecular dynamics simulations of TiN/TiN(001) epitaxial film growth2016In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 34, no 4, p. 041509-1-041509-9Article in journal (Refereed)
    Abstract [en]

    Large-scale classical molecular dynamics simulations of epitaxial TiN/TiN(001) thin film growth at 1200K are carried out using incident flux ratios N/Ti -1, 2, and 4. The films are analyzed as a function of composition, island size distribution, island edge orientation, and vacancy formation. Results show that N/Ti-1 films are globally understoichiometric with dispersed Ti-rich surface regions which serve as traps to nucleate 111-oriented islands, leading to local epitaxial breakdown. Films grown with N/Ti=2 are approximately stoichiometric and the growth mode is closer to layer-by-layer, while N/Ti-4 films are stoichiometric with N-rich surfaces. As N/Ti is increased from 1 to 4, island edges are increasingly polar, i. e., 110-oriented, and N-terminated to accommodate the excess N flux, some of which is lost by reflection of incident N atoms. N vacancies are produced in the surface layer during film deposition with N/Ti-1 due to the formation and subsequent desorption of N-2 molecules composed of a N adatom and a N surface atom, as well as itinerant Ti adatoms pulling up N surface atoms. The N vacancy concentration is significantly reduced as N/Ti is increased to 2; with N/Ti-4, Ti vacancies dominate. Overall, our results show that an insufficient N/Ti ratio leads to surface roughening via nucleation of small dispersed 111 islands, whereas high N/Ti ratios result in surface roughening due to more rapid upper-layer nucleation and mound formation. The growth mode of N/Ti-2 films, which have smoother surfaces, is closer to layer-by-layer. (C) 2016 American Vacuum Society.

  • 6.
    Sangiovanni, Davide
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Edström, Daniel
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Chirita, Valeriu
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Petrov, Ivan
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Greene, Joseph E
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Dynamics of Ti, N, and TiNx (x=1-3) admolecule transport on TiN(001) surfaces2012In: Physical Review B. Condensed Matter and Materials Physics, ISSN 1098-0121, E-ISSN 1550-235X, Vol. 86, no 15, p. 155443-Article in journal (Refereed)
    Abstract [en]

    We use classical molecular dynamics and the modified embedded atom method formalism to investigate the dynamics of atomic-scale transport on a low-index model compound surface, TiN(001). Our simulations, totaling 0.25 mu s for each case study, follow the pathways and migration kinetics of Ti and N adatoms, as well as TiNx complexes with x = 1-3, which are known to contribute to the growth of TiN thin films by reactive deposition from Ti, N-2, and N precursors. The simulations are carried out at 1000 K, within the optimal range for TiN(001) epitaxial growth. We find Ti adatoms to be the highest-mobility species on TiN(001), with the primary migration path involving jumps of one nearest-neighbor distance d(NN) between adjacent fourfold hollow sites along in-plane andlt; 100 andgt; channels. Long jumps, 2d(NN), are also observed, but at much lower frequency. N adatoms, which exhibit significantly lower migration rates than Ti, diffuse along in-plane andlt; 110 andgt; directions and, when they intersect other N atoms, associatively form N-2 molecules, which desorb at kinetic rates. As expected, TiN and TiN3 complexes migrate at even lower rates with complex diffusion pathways involving rotations, translations, and rototranslations. TiN2 trimers, however, are shown to have surprisingly high diffusion rates, above that of N adatoms and almost half that of Ti adatoms. TiN3 motion is dominated by in-place rotation with negligible diffusion.

  • 7.
    Sangiovanni, Davide
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Theoretical Physics. Linköping University, The Institute of Technology.
    Edström, Daniel
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Petrov, Ivan
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. University of Illinois, Urbana, USA.
    Greene, Joseph E
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. University of Illinois, Urbana, USA.
    Chirita, Valeriu
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Ab-initio and classical molecular dynamics simulations of N2 desorption from TiN(001) surfaces2014In: Surface Science, ISSN 0039-6028, E-ISSN 1879-2758, Vol. 624, p. 25-31Article in journal (Refereed)
    Abstract [en]

    Ab initio molecular dynamics simulations based on density functional theory show that N adatoms are chemisorbed in threefold sites close to a N surface atom and between the two diagonally opposed neighboring Ti surface atoms on TiN(001). The most probable N adatom reaction pathway, even in the presence of nearby N adatoms, is for the N adatom and N surface atom pair to first undergo several exchange reactions and then desorb as a N2 molecule, resulting in a surface anion vacancy, with an activation barrier Edes of 1.37 eV and an attempt frequency Ades = 3.4 × 1013 s− 1. Edes is essentially equal to the N adatom surface diffusion barrier, Es = 1.39 eV, while As is only three to four times larger than Ades, indicating that isolated N adatoms migrate for only short distances prior to N2 desorption. The probability of N2 desorption via recombination of N adatoms on TiN(001) is much lower due to repulsive adatom/adatom interactions at separations less than ~ 3 Å which rapidly increase to ~ 2 eV at a separation of 1.5 Å. We obtain good qualitative and quantitative agreement with the above results using the modified embedded atom method potential to perform classical molecular dynamics simulations.

  • 8.
    Sangiovanni, Davide
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Theoretical Physics. Linköping University, The Institute of Technology.
    Edström, Daniel
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Petrov, Ivan
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. University of Illinois, Urbana, USA.
    Greene, Joseph E
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. University of Illinois, Urbana, USA.
    Chirita, Valeriu
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Ti adatom diffusion on TiN(001): Ab initio and classical molecular dynamics simulations2014In: Surface Science, ISSN 0039-6028, E-ISSN 1879-2758, Vol. 627, p. 34-41Article in journal (Refereed)
    Abstract [en]

    Ab initio and classical molecular dynamics (AIMD and CMD) simulations reveal that Ti adatoms on TiN(001) surfaces migrate between neighboring fourfold hollow sites primarily along in-plane less than100greater than channels. less than100greater than and less than110greater than single jumps, as well as less than100greater than double jump rates, obtained directly from MD runs as a function of temperature, are used to determine diffusion activation energies Ea, and attempt frequencies A, for the three preferred Ti adatom migration pathways on TiN(001). From transition rates Aexp[-Ea / (k(B)T)], we determine adatom surface distribution probabilities as a function of time, which are used to calculate adatom diffusion coefficients D(T). AIMD and CMD predictions are consistent and complementary. Using CMD, we investigate the effect on the adatom jump rate of varying the phonon wavelength degrees of freedom by progressively increasing the supercell size. We find that long-wavelength phonons significantly contribute to increasing adatom mobilities at temperatures less than= 600 K, but not at higher temperatures. Finally, by directly tracking the Ti adatom mean-square displacement during CMD runs, we find that Ti adatom jumps are highly correlated on TiN(001), an effect that yields lower D-s values (D-s(corr)) than those estimated from uncorrelated transition probabilities. The temperature-dependent diffusion coefficient is D-s(corr) (T) = (4.5 x 10(-4) Cm-2 s(-1)) exp[-0.55 eV / (k(B)T)].

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