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  • 1.
    Eriksson, Anders
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Ghafoor, Naureen
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Jensen, Jens
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Johansson, Mats
    Linköping University, Department of Physics, Chemistry and Biology, Nanostructured Materials. Linköping University, The Institute of Technology.
    Sjölen, J.
    Seco Tools AB, Fagersta, Sweden.
    Odén, Magnus
    Linköping University, Department of Physics, Chemistry and Biology, Nanostructured Materials. Linköping University, The Institute of Technology.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Arc deposition of Ti–Si–C–N thin films from binary and ternary cathodes — Comparing sources of C2012In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 213, p. 145-154Article in journal (Refereed)
    Abstract [en]

    Ti–Si–C–N thin films with composition of 1–11 at.% Si and 1–20 at.% C have been deposited onto cemented carbide substrates by arcing Ti–Si cathodes in a CH4 + N2 gas mixture and, alternatively, through arcing Ti–Si–C cathodes in N2. Films of comparable compositions from the two types of cathodes have similar structure and properties. Hence, C can be supplied as either plasma ions generated from the cathode or atoms from the gas phase with small influence on the structural evolution. Over the compositional range obtained, the films were dense and cubic-phase nanocrystalline, as characterized by X-ray diffraction, ion beam analysis, and scanning and transmission electron microscopy. The films have high hardness (30–40 GPa by nanoindentation) due to hardening from low-angle grain boundaries on the nanometer scale and lattice defects such as growth-induced vacancies and alloying element interstitials.

  • 2.
    Goyenola, Cecilia
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Lai, Chung-Chuan
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Lu, Jun
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Högberg, Hans
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Gueorguiev, Gueorgui Kostov
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Theoretical prediction and synthesis of CSxFy thin films2016In: The Journal of Physical Chemistry C, ISSN 1932-7447, E-ISSN 1932-7455, Vol. 120, no 17, p. 9527-9534Article in journal (Refereed)
    Abstract [en]

    A new carbon-based compound: CSxFy was addressed by density functional theory calculations and synthesized by reactive magnetron sputtering. Geometry optimizations and energy calculations were performed on graphene-like model systems containing sulfur and fluorine atoms. It is shown that [S+F] concentrations in the range of 0−10 at.%, structural ordered characteristics similar to graphene pieces containing ring defects are energetically feasible. The modeling predicts that CSxFy thin films with graphite and fullerene-like characteristics may be obtained for the mentioned concentration range. Accordingly, thin films were synthesized from a graphite solid target and sulfur hexafluoride as reactive gas. In agreement with the theoretical prediction, transmission electron microscopy characterization and selected area electron diffraction confirmed the presence of small ordered clusters with graphitic features in a sample containing 0.4 at.% of S and 3.4 at.% of F.

  • 3.
    Halim, Joseph
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Department of Materials Science & Engineering and 3A.J. Drexel Nanotechnology Institute, Drexel University, Philadelphia, USA.
    Cook, Kevin M.
    University of Penn, PA 19104 USA Drexel University, PA 19104 USA .
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Magnuson, Martin
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. University of Penn, PA 19104 USA .
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Gogotsi, Yury
    University of Penn, PA 19104 USA Drexel University, PA 19104 USA .
    Eklund, Per
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Barsoum, Michel W.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Department of Materials Science & Engineering, Drexel University, Philadelphia, USA.
    X-ray Photoelectron Spectroscopy Characterization of Two-Dimensional Titanium Metal Carbides (MXenes)2014Manuscript (preprint) (Other academic)
    Abstract [en]

    Herein, we report X-ray Photoelectron Spectroscopy (XPS) analysis for cold pressed exfoliated 2D nanocrystals of transition metal carbides, MXenes. MXenes are a recently discovered family of 2D materials produced by selective chemical etching of the A element from MAX phases which are ternary metal carbides and nitrides. The latter has the formula of Mn+1AXn, where M is an early transition metal, A is an A-group element, and X is C and/or N. This study is a comparison between two MXenes, Ti3C2Tx and Ti2CTx, where Tx stands for surface termination groups such as –O, –OH, and –F. Ti3C2Tx and Ti2CTx were prepared by immersion of Ti3AlC2 and Ti2AlC powders in 50% conc. HF. A thorough XPS analysis was performed through peak fitting of high resolution XPS spectra and valence band, VB, spectra analysis. The effect of Ar sputtering as well as the number of layers n was the primarily interest of this study. According to the peak fitting analysis, both phases contain the following species, Ti–C, C–C, Ti–F, Ti–O and Ti–OH resulting in the following chemical formulas: Ti3C2(OH)x(O)y(F)z and Ti2C(OH)x(O)y(F)z. Comparing the VB spectra with the DOS calculations show the valance band spectra is actually a mixture of MXene with various terminations of OH, O and F. Before Ar+ sputtering both phases show a large percentage of fluorinated-TiO2 which is due to MXene surface oxidation as well as CHx, C-O and COO groups arising from either surface contaminations or due to drying the etched powders in ethanol after washing the powder of the HF acid. According to the VB spectra, it is shown that the fluorinated TiO2 is actually a mixture of anatase and rutile. The number of layers, n, also plays a role; the lower n, the more the MXene is prone to oxidation.

  • 4.
    Halim, Joseph
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Univ Penn, PA 19104 USA Drexel Univ, PA 19104 USA.
    Lukatskaya, Maria R.
    University of Penn, PA 19104 USA Drexel University, PA 19104 USA .
    Cook, Kevin M.
    University of Penn, PA 19104 USA Drexel University, PA 19104 USA .
    Lu, Jun
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Smith, Cole R.
    University of Penn, PA 19104 USA .
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    May, Steven J.
    University of Penn, PA 19104 USA .
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Gogotsi, Yury
    University of Penn, PA 19104 USA Drexel University, PA 19104 USA .
    Eklund, Per
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Barsoum, Michel
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Transparent Conductive Two-Dimensional Titanium Carbide Epitaxial Thin Films2014In: Chemistry of Materials, ISSN 0897-4756, E-ISSN 1520-5002, Vol. 26, no 7, p. 2374-2381Article in journal (Refereed)
    Abstract [en]

    Since the discovery of graphene, the quest for two-dimensional (2D) materials has intensified greatly. Recently, a new family of 2D transition metal carbides and carbonitrides (MXenes) was discovered that is both conducting and hydrophilic, an uncommon combination. To date MXenes have been produced as powders, flakes, and colloidal solutions. Herein, we report on the fabrication of similar to 1 x 1 cm(2) Ti3C2 films by selective etching of Al, from sputter-deposited epitaxial Ti3AlC2 films, in aqueous HF or NH4HF2. Films that were about 19 nm thick, etched with NH4HF2, transmit similar to 90% of the light in the visible-to-infrared range and exhibit metallic conductivity down to similar to 100 K. Below 100 K, the films resistivity increases with decreasing temperature and they exhibit negative magnetoresistance-both observations consistent with a weak localization phenomenon characteristic of many 2D defective solids. This advance opens the door for the use of MXenes in electronic, photonic, and sensing applications.

  • 5.
    Holmin, Susanne
    et al.
    Permascand AB, Sweden; Mid Sweden University, Sweden.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Sigurdur Ingason, Arni
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Zimmerman, Erik
    Permascand AB, Sweden.
    Corrosion of ruthenium dioxide based cathodes in alkaline medium caused by reverse currents2014In: Electrochimica Acta, ISSN 0013-4686, E-ISSN 1873-3859, Vol. 146, p. 30-36Article in journal (Refereed)
    Abstract [en]

    A reverse current obtained during power shutdowns in industrial processes, such as chlor-alkali production or alkaline water electrolysis, is deleterious for hydrogen evolving ruthenium dioxide (Ru02) based cathodes. It has been observed that RuO2 coatings after a power shutdown, necessary for e.g. maintenance, are severely damaged unless polarization rectifiers are employed. In this work we show why these types of cathodes are sensitive to reverse currents, i.e. anodic currents, after hydrogen evolution. RuO2 coatings deposited on nickel substrates were subjected to different electrochemical treatments such as hydrogen evolution, oxygen evolution, or reverse currents in 8 M NaOH at 90 degrees C. Polarity inversion was introduced after hydrogen evolution to simulate the effect of reverse currents. Because of chemical interaction with hydrogen, a significant amount of the RuO2 coating was transformed into hydroxylated species during cathodic polarization. Our study shows that these hydroxylated phases are highly sensitive to electrochemical corrosion during anodic polarization after extended hydrogen evolution.

  • 6.
    Lai, Chung-Chuan
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Meshkian, Rahele
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Dahlqvist, Martin
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Lu, Jun
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Rivin, O.
    Nucl Research Centre Negev, Israel.
    Caspi, E. N.
    Nucl Research Centre Negev, Israel.
    Ozeri, O.
    Soreq Nucl Research Centre, Israel.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Eklund, Per
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Barsoum, Michel
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. Drexel University, PA 19104 USA.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Structural and chemical determination of the new nanolaminated carbide Mo2Ga2C from first principles and materials analysis2015In: Acta Materialia, ISSN 1359-6454, E-ISSN 1873-2453, Vol. 99, p. 157-164Article in journal (Refereed)
    Abstract [en]

    Following our recent discovery of a new nanolaminated carbide, Mo2Ga2C, we herein present a detailed structural and chemical analysis of this phase based on ab initio calculations, X-ray photoelectron spectroscopy, high resolution scanning transmission electron microscopy, and neutron powder diffraction. Calculations suggest an energetically and dynamically stable structure for C in the octahedral sites between the Mo layers, with Ga bilayers - stacked in a simple hexagonal arrangement - between the Mo2C layers. The predicted elastic properties are below those of the related nanolaminate Mo2GaC. The predicted structure, including lattice parameters and atomic positions, is experimentally confirmed. (C) 2015 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

  • 7.
    Magnuson, Martin
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Halim, Joseph
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Chemical bonding in carbide MXene nanosheets2018In: Journal of Electron Spectroscopy and Related Phenomena, ISSN 0368-2048, E-ISSN 1873-2526, Vol. 224, p. 27-32Article in journal (Refereed)
    Abstract [en]

    tThe chemical bonding in the carbide core and the surface chemistry in a new group of transition-metalcarbides Tin+1Cn-Tx(n = 1,2) called MXenes have been investigated by surface-sensitive valence bandX-ray photoelectron spectroscopy. Changes in band structures of stacked nano sheets of different thick-nesses are analyzed in connection to known hybridization regions of TiC and TiO2that affect elastic andtransport properties. By employing high excitation energy, the photoelectron cross-section for the C 2s– Ti 3d hybridization region at the bottom of the valence band is enhanced. As shown in this work, theO 2p and F 2p bands strongly depend both on the bond lengths to the surface groups and the adsorptionsites. The effect of surface oxidation and Ar+sputtering on the electronic structure is also discussed.

  • 8.
    Meshkian, Rahele
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Halim, Joseph
    Department of Materials Science & Engineering, Drexel University, Philadelphia, USA.
    Lu, Jun
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Barsoum, Michel W.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Synthesis of two-dimensional molybdenum carbide, Mo2C, from the gallium based atomic laminate Mo2Ga2C2015In: Scripta Materialia, ISSN 1359-6462, E-ISSN 1872-8456, Vol. 108, p. 147-150Article in journal (Refereed)
    Abstract [en]

    We report on the synthesis of a two-dimensional transition metal carbide, Mo2C, (MXene) obtained by immersing Mo2Ga2C thin films in hydrofluoric acid. Experimental evidences for neither synthesis of a Mo-based MXene nor selective etching of Ga from an atomic nanolaminate have previously been presented. MXene formation is verified through X-ray diffraction, transmission electron microscopy, and energy dispersive X-ray spectroscopy. This discovery unlocks new potential applications for Mo-based MXenes in a host of applications, from thermoelectrics to catalysis and energy storage.

  • 9.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Menlo Park, CA 94025, United States.
    Hydrogenation of O and OH on Pt(111): A comparison between the reaction rates of the first and the second hydrogen addition steps2014In: Journal of Chemical Physics, ISSN 0021-9606, E-ISSN 1089-7690, Vol. 140, no 10, p. 104701-Article in journal (Refereed)
    Abstract [en]

    The formation of water through hydrogenation of oxygen on platinum occurs at a surprisingly low reaction rate. The reaction rate limited process for this catalytic reaction is, however, yet to be settled. In the present work, the reaction rates of the first and the second hydrogen addition steps are compared when hydrogen is obtained through intense synchrotron radiation that induces proton production in a water overlayer on top of the adsorbed oxygen species. A substantial amount of the produced hydrogen diffuses to the platinum surface and promotes water formation at the two starting conditions O/Pt(111) and (H 2O+OH)/Pt(111). The comparison shows no significant difference in the reaction rate between the first and the second hydrogen addition steps, which indicates that the rate determining process of the water formation from oxygen on Pt(111) is neither the first nor the second H addition step or, alternatively, that both H addition steps exert rate control. © 2014 AIP Publishing LLC.

  • 10.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. SLAC National Accelerator Lab, CA USA .
    Reaction kinetics for the oxygen hydrogenation process on Pt(111) derived from temperature-programmed XPS2013In: Surface Science, ISSN 0039-6028, E-ISSN 1879-2758, Vol. 618, p. 42-48Article in journal (Refereed)
    Abstract [en]

    Oxygen hydrogenation under ultra high vacuum conditions at the platinum surface was explored using temperature-programmed X-ray photoelectron spectroscopy. Through modeling of the oxygen consumption, information on the reaction kinetics was obtained indicating that the reaction rate of the oxygen hydrogenation process depends on the hydrogen diffusion and on the lifetime of hydroxyl intermediates. The reaction rate is, however, enhanced when an autocatalytic process stabilizes the hydroxyl intermediates through hydrogen bonding to neighboring water molecules. The overall activation energy for the hydrogenation of atomic oxygen to form water was determined to be 0.20 eV with a frequency factor of only 10(3) s(-1).

  • 11.
    Näslund, Lars-Åke
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Ingason, Arni Sigurdur
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Holmin, Susanne
    Permascand AB, Ljungaverk, Sweden; Mid Sweden University, Sundsvall, Sweden.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Formation of RuO(OH)(2) on RuO2-Based Electrodes for Hydrogen Production2014In: The Journal of Physical Chemistry C, ISSN 1932-7447, E-ISSN 1932-7455, Vol. 118, no 28, p. 15315-15323Article in journal (Refereed)
    Abstract [en]

    The catalytic and durable electrode coating of ruthenium dioxide (RuO2), applied on nickel (Ni) substrates, is today utilized as electrocatalytic cathodes for hydrogen production, e.g., in the chlor-alkali process and alkaline water electrolysis. The drawback is, however, the sensitivity to reverse currents obtained during power shutdowns, e.g., at maintenance, where the RuO2-based electrodes can be severely damaged unless polarization rectifiers are employed. Through the material characterization techniques X-ray diffraction and X-ray photoelectron spectroscopy, we can now reveal that RuO2 coatings, when exposed to hydrogen evolution at industrially relevant conditions, transforms into ruthenium oxyhydroxide (RuO(OH)(2)). The study further shows that as the hydrogen evolution proceeds the formed RuO(OH)(2) reduces to metallic ruthenium (Ru).

  • 12.
    Näslund, Lars-Åke
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Sánchez-Sánchez, Carlos M.
    University of Alicante, Spain .
    Ingason, Arni Sigurdur
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Bäckström, Joakim
    Permascand AB, Ljungaverk, Sweden.
    Herrero, Enrique
    University of Alicante, Spain .
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Holmin, Susanne
    Permascand AB, Ljungaverk, Sweden.
    The Role of TiO2 Doping on RuO2-Coated Electrodes for the Water Oxidation Reaction2013In: The Journal of Physical Chemistry C, ISSN 1932-7447, E-ISSN 1932-7455, Vol. 117, no 12, p. 6126-6135Article in journal (Refereed)
    Abstract [en]

    Electrochemical water splitting into H-2 and O-2 presents a significant and challenging energy loss due to the high overpotential required at the anode. Today, in industrially relevant applications, dimensionally stable anodes (DSA) based on the electrocatalytic active RuO2 are conventionally utilized. To enhance the resistance against corrosion, incorporation of TiO2 in the RuO2-coated electrodes is widely employed. In the present work we have used scanning electrochemical microscopy (SECM) to demonstrate that TiO2-doped RuO2-coated electrodes, in addition to being more durable, also show an electrocatalytic activity that is, on average, 13% higher as compared to the pure RuO2-coated electrodes. We also demonstrate that cracks in the pure RuO2 coating are the most active zones, probably because Ti from the Ti support has diffused into the first applied layer of the RuO2 coating. To reveal the nature of this enhanced activity for water oxidation displayed on TiO2-doped RuO2 electrodes, we have employed X-ray photoelectron spectroscopy (XPS) for material characterization. The results show that the electrocatalytic activity enhancement displayed on the mixed (Ru1-x:Ti-x)O-2 coating is promoted through a charge transfer from the RuO2 to the TiO2, which provides new and more reactive sites designated as activated RuO2 delta+.

  • 13.
    Schroeder, Jeremy
    et al.
    Linköping University, Department of Physics, Chemistry and Biology. Linköping University, Faculty of Science & Engineering.
    Thomson, W.
    PVD Prod Inc, MA 01887 USA.
    Howard, B.
    PVD Prod Inc, MA 01887 USA.
    Schell, N.
    Helmholtz Zentrum Geesthacht, Germany.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Rogström, Lina
    Linköping University, Department of Physics, Chemistry and Biology, Nanostructured Materials. Linköping University, Faculty of Science & Engineering.
    Johansson-Jöesaar, Mats P.
    Seco Tools AB, Sweden.
    Ghafoor, Naureen
    Linköping University, Department of Physics, Chemistry and Biology, Nanostructured Materials. Linköping University, Faculty of Science & Engineering.
    Odén, Magnus
    Linköping University, Department of Physics, Chemistry and Biology, Nanostructured Materials. Linköping University, Faculty of Science & Engineering.
    Nothnagel, E.
    PVD Prod Inc, MA 01887 USA.
    Shepard, A.
    PVD Prod Inc, MA 01887 USA.
    Greer, J.
    PVD Prod Inc, MA 01887 USA.
    Birch, Jens
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Industry-relevant magnetron sputtering and cathodic arc ultra-high vacuum deposition system for in situ x-ray diffraction studies of thin film growth using high energy synchrotron radiation2015In: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 86, no 9, p. 095113-Article in journal (Refereed)
    Abstract [en]

    We present an industry-relevant, large-scale, ultra-high vacuum (UHV) magnetron sputtering and cathodic arc deposition system purposefully designed for time-resolved in situ thin film deposition/annealing studies using high-energy (greater than50 keV), high photon flux (greater than10(12) ph/s) synchrotron radiation. The high photon flux, combined with a fast-acquisition-time (less than1 s) two-dimensional (2D) detector, permits time-resolved in situ structural analysis of thin film formation processes. The high-energy synchrotron-radiation based x-rays result in small scattering angles (less than11 degrees), allowing large areas of reciprocal space to be imaged with a 2D detector. The system has been designed for use on the 1-tonne, ultra-high load, high-resolution hexapod at the P07 High Energy Materials Science beamline at PETRA III at the Deutsches Elektronen-Synchrotron in Hamburg, Germany. The deposition system includes standard features of a typical UHV deposition system plus a range of special features suited for synchrotron radiation studies and industry-relevant processes. We openly encourage the materials research community to contact us for collaborative opportunities using this unique and versatile scientific instrument. (C) 2015 AIP Publishing LLC.

  • 14.
    Tucker, Mark
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Czigany, Zsolt
    Research Institute for Technical Physics and Materials Science, RCNS, Budapest, Hungary.
    Broitman, Esteban
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Hultman, Lars
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
    Filtered pulsed cathodic arc deposition of fullerene-like carbon and carbon nitride films2014In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 115, no 14, p. 144312-Article in journal (Refereed)
    Abstract [en]

    Carbon and carbon nitride films (CNx , 0 ≤ x ≤ 0.26) were deposited by filtered pulsed cathodic arc and were investigated using transmission electron microscopy and X-ray photoelectron spectroscopy. A “fullerene-like” (FL) structure of ordered graphitic planes, similar to that of magnetron sputtered FL-CNx films, was observed in films deposited at 175 °C and above, with N2 pressures of 0 and 0.5 mTorr. Higher substrate temperatures and significant nitrogen incorporation are required to produce similar FL structure by sputtering, which may, at least in part, be explained by the high ion charge states and ion energies characteristic of arc deposition. A gradual transition from majority sp3-hybridized films to sp2 films was observed with increasing substrate temperature. High elastic recovery, an attractive characteristic mechanical property of FL-CNx films, is evident in arc-deposited films both with and without nitrogen content, and both with and without FL structure.

  • 15.
    Zhirkov, Igor
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Petruhins, Andrejs
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Näslund, Lars-Åke
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Kolozsvari, Szilard
    PLANSEE Composite Mat GmbH, Germany.
    Polcik, Peter
    PLANSEE Composite Mat GmbH, Germany.
    Rosén, Johanna
    Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
    Vacuum arc plasma generation and thin film deposition from a TiB2 cathode2015In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 107, no 18, p. 184103-Article in journal (Refereed)
    Abstract [en]

    We have studied the utilization of TiB2 cathodes for thin film deposition in a DC vacuum arc system. We present a route for attaining a stable, reproducible, and fully ionized plasma flux of Ti and B by removal of the external magnetic field, which leads to dissipation of the vacuum arc discharge and an increased active surface area of the cathode. Applying a magnetic field resulted in instability and cracking, consistent with the previous reports. Plasma analysis shows average energies of 115 and 26 eV, average ion charge states of 2.1 and 1.1 for Ti and B, respectively, and a plasma ion composition of approximately 50% Ti and 50% B. This is consistent with measured resulting film composition from X-ray photoelectron spectroscopy, suggesting a negligible contribution of neutrals and macroparticles to the film growth. Also, despite the observations of macroparticle generation, the film surface is very smooth. These results are of importance for the utilization of cathodic arc as a method for synthesis of metal borides. (C) 2015 AIP Publishing LLC.

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