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  • 1.
    Booker, Ian Don
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Abdalla, Hassan
    Linköping University, Department of Physics, Chemistry and Biology, Chemical and Optical Sensor Systems. Linköping University, Faculty of Science & Engineering.
    Hassan, Jawad
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Karhu, Robin
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Lilja, Louise
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Janzén, Erik
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Sveinbjörnsson, Einar
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering. Science Institute, University of Iceland, Reykjavik, Iceland.
    Oxidation-induced deep levels in n- and p-type 4H- and 6H-SiC and their influence on carrier lifetime2016In: Physical Review Applied, ISSN 2331-7019, Vol. 6, no 1, p. 1-15, article id 014010Article in journal (Refereed)
    Abstract [en]

    We present a complete analysis of the electron- and hole-capture and -emission processes of the deep levels ON1, ON2a, and ON2b in 4H-SiC and their 6H-SiC counterparts OS1a and OS1b through OS3a and OS3b, which are produced by lifetime enhancement oxidation or implantation and annealing techniques. The modeling is based on a simultaneous numerical fitting of multiple high-resolution capacitance deep-level transient spectroscopy spectra measured with different filling-pulse lengths in n- and p-type material. All defects are found to be double-donor-type positive-U two-level defects with very small hole-capture cross sections, making them recombination centers of low efficiency, in accordance with minority-carrier-lifetime measurements. Their behavior as trapping and weak recombination centers, their large concentrations resulting from the lifetime enhancement oxidations, and their high thermal stability, however, make it advisable to minimize their presence in active regions of devices, for example, the base layer of bipolar junction transistors.

  • 2.
    Booker, Ian Don
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Abdalla, Hassan
    Linköping University, Department of Physics, Chemistry and Biology, Complex Materials and Devices. Linköping University, The Institute of Technology.
    Lilja, L.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    ul-Hassan, Jawad
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Bergman, Peder
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Sveinbjörnsson, Einar
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Janzén, Erik
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Oxidation induced ON1, ON2a/b defects in 4H-SiC characterized by DLTS2014In: SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2, Trans Tech Publications , 2014, Vol. 778-780, p. 281-284Conference paper (Refereed)
    Abstract [en]

    The deep levels ON1 and ON2a/b introduced by oxidation into 4H-SiC are characterized via standard DLTS and via filling pulse dependent DLTS measurements. Separation of the closely spaced ON2a/b defect is achieved by using a higher resolution correlation function (Gaver-Stehfest 4) and apparent energy level, apparent electron capture cross section and filling pulse measurement derived capture cross sections are given.

  • 3.
    Booker, Ian Don
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Hassan, Jawad
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Janzén, Erik
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Sveinbjörnsson, Einar
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering. Science Institute, University of Iceland, Reykjavik, Iceland.
    Electron and hole capture cross sections of deep levels accessible by DLTS and MCTS in p-type 4H-SiCManuscript (preprint) (Other academic)
    Abstract [en]

    The effective electron (σn(T)) and hole (σn(T)) capture cross sections of the electrically active deep levels HK0, HK2, LB1 and EM1 found in as-grown, high temperature annealed and oxidized p-type 4H-SiC were measured by deep level transient spectroscopy (DLTS), minority carrier transient spectroscopy (MCTS) and optical-electrical MCTS and DLTS (OE-MCTS and EO-DLTS) in an effort to determine the potential recombination centers in p-type material. Additionally, we also find the D-center, and the deep levels EH6/7, ON1 and ON2 in our samples, while the levels HK1, HK3 and HK4, reported in literature, are always below the detection limit. We further compare deep level concentrations and the timeresolved photoluminescence (TRPL) measured low injection (τLI) in samples annealed at up to 1920 °C. None of the detected deep levels possess σp(T):σn(T) ratios which could enable them to act as efficient recombination centers in the annealed epilayers, where τLI ranges from 1.2·10-6 s to less than 100·10-9 s. However, a clear anti-correlation between τLI and the EH6/7 concentration is found, which is linked to the main lifetime limiting center in n-type material, Z1/2, via their common origin, the carbon vacancy. Due to their large σp(T):σn(T) ratio, the Z1/2 deep levels are not detected by frontside illumination MCTS in p-type material. We thus conclude that the main lifetime limiting deep level(s) in p-type 4HSiC appear to be located in the upper half of the bandgap and are most likely either Z1/2, or other deep levels of intrinsic or partially intrinsic origin with a similar σp(T):σn(T) ratio.

  • 4.
    Booker, Ian Don
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Hassan, Jawad
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Stenberg, Pontus
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Janzén, Erik
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Sveinbjörnsson, Einar
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering. Science Institute, University of Iceland, Reykjavik, Iceland.
    Carrier lifetime in p- and n-type 4H-SiCManuscript (preprint) (Other academic)
    Abstract [en]

    Temperature-dependent time-resolved photoluminescence measurements made in the temperature range from 77 K to 1000 K on free-standing as grown n-type 4H-SiC and p-type 4H-SiC epilayers, which are either as-grown or annealed at 1000 °C, 1400 °C or 1700 °C, are analyzed. The development of the instantaneous carrier lifetime over temperature, calculated from the decay curves of all n- and p-type samples, is found to be identical in the entire temperature range. With increasing annealing temperature only the magnitude of the lifetime in p-type 4H-SiC decreases while the trend remains identical to that in the as-grown n-type sample. Annealing thus only increases the density of the main recombination center which appears to control lifetime in as-grown n- and p-type material. The results implies that the lifetime in all samples may be governed by the same intrinsic defect, which we suggest to be Z1/2.

  • 5.
    Booker, Ian Don
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Janzén, Erik
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Son, Nguyen Tien
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Hassan, Jawad
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Stenberg, Pontus
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Sveinbjörnsson, Einar
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering. Science Institute, University of Iceland, Reykjavik, Iceland.
    Donor and double donor transitions of the carbon vacancy related EH6/7 deep level in 4H-SiC2016In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 119, no 23, article id 235703Article in journal (Refereed)
    Abstract [en]

    Using medium- and high-resolution multi-spectra fitting of deep level transient spectroscopy (DLTS), minority carrier transient spectroscopy (MCTS), optical O-DLTS and optical-electrical (OE)-MCTS measurements, we show that the EH6∕7 deep level in 4H-SiC is composed of two strongly overlapping, two electron emission processes with thermal activation energies of 1.49 eV and 1.58 eV for EH6 and 1.48 eV and 1.66 eV for EH7. The electron emission peaks of EH7 completely overlap while the emission peaks of EH6 occur offset at slightly different temperatures in the spectra. OE-MCTS measurements of the hole capture cross section σp 0(T) in p-type samples reveal a trap-Auger process, whereby hole capture into the defect occupied by two electrons leads to a recombination event and the ejection of the second electron into the conduction band. Values of the hole and electron capture cross sections σn(T) and σp(T) differ strongly due to the donor like nature of the deep levels and while all σn(T) have a negative temperature dependence, the σp(T) appear to be temperature independent. Average values at the DLTS measurement temperature (∼600 K) are σn 2+(T) ≈ 1 × 10−14 cm2, σn +(T) ≈ 1 × 10−14 cm2, and σp 0(T) ≈ 9 × 10−18 cm2 for EH6 and σn 2+(T) ≈ 2 × 10−14 cm2, σn +(T) ≈ 2 × 10−14 cm2, σp 0(T) ≈ 1 × 10−20 cm2 for EH7. Since EH7 has already been identified as a donor transition of the carbon vacancy, we propose that the EH6∕7 center in total represents the overlapping first and second donor transitions of the carbon vacancy defects on both inequivalent lattice sites.

  • 6.
    Booker, Ian Don
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Ul Hassan, Jawad
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Lilja, Louise
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Beyer, Franziska
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Karhu, Robin
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Bergman, J. Peder
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Danielsson, Örjan
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Kordina, Olof
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Sveinbjörnsson, Einar
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Janzén, Erik
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
    Carrier Lifetime Controlling Defects Z(1/2) and RB1 in Standard and Chlorinated Chemistry Grown 4H-SiC2014In: Crystal Growth & Design, ISSN 1528-7483, E-ISSN 1528-7505, Vol. 14, no 8, p. 4104-4110Article in journal (Refereed)
    Abstract [en]

    4H-SiC epilayers grown by standard and chlorinated chemistry were analyzed for their minority carrier lifetime and deep level recombination centers using time-resolved photoluminescence (TRPL) and standard deep level transient spectroscopy (DLTS). Next to the well-known Z(1/2) deep level a second effective lifetime killer, RB1 (activation energy 1.05 eV, electron capture cross section 2 x 10(-16) cm(2), suggested hole capture cross section (5 +/- 2) x 10(-15) cm(2)), is detected in chloride chemistry grown epilayers. Junction-DLTS and bulk recombination simulations are used to confirm the lifetime killing properties of this level. The measured RB1 concentration appears to be a function of the iron-related Fe1 level concentration, which is unintentionally introduced via the corrosion of reactor steel parts by the chlorinated chemistry. Reactor design and the growth zone temperature profile are thought to enable the formation of RB1 in the presence of iron contamination under conditions otherwise optimal for growth of material with very low Z(1/2) concentrations. The RB1 defect is either an intrinsic defect similar to RD1/2 or EH5 or a complex involving iron. Control of these corrosion issues allows the growth of material at a high growth rate and with high minority carrier lifetime based on Z(1/2) as the only bulk recombination center.

  • 7.
    Booker, Ian Don
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Yazdanfar, Milan
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Janzén, Erik
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Sveinbjörnsson, Einar
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering. Science Institute, University of Iceland, Reykjavik, Iceland.
    Shallow boron, the deep D-center and their influence on carrier lifetime in n- and p-type 4H-SiCManuscript (preprint) (Other academic)
    Abstract [en]

    The shallow boron and deep D-center are analyzed by minority carrier transient spectroscopy (MCTS), deep level transient spectroscopy (DLTS) and optical-electrical MCTS in n-type 4H-SiC with varying concentrations of boron, and in p-type 4H-SiC. MCTS, using high resolution correlation functions, shows the D-center to be composed of two closely overlapping peaks, referred to as D(a) and D(b), both most likely originating from the same defect located on inequivalent lattice sites. The hole capture cross sections of the D center are derived from DLTS filling pulse measurements in p-type material. The electron capture behavior of the D-center is analyzed by optical-electrical MCTS, and we find the center to be a pure hole trap, unable to act as a recombination center, with electron capture cross sections smaller than 1·10-23 cm2. The shallow boron peak is found to be composed of two or more overlapping levels in high resolution MCTS spectra. The shallow levels are further demonstrated to produce minority carrier trapping and detrapping effects in n-type 4H-SiC, which result in long time-resolved photoluminescence (TRPL) transients with microsecond decay constants, even in material containing high concentrations of the lifetime killing center Z1/2.

  • 8.
    Khosa, Rabia Y.
    et al.
    Science Institute, University of Iceland, IS-107 Reykjavík, Iceland.
    Sveinbjörnsson, Einar
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering. Science Institute, University of Iceland, IS-107 Reykjavík, Iceland.
    Winters, Michael
    Department of Microtechnology and Nanoscience, Chalmers University of Technology, SE-41296 Göteborg, Sweden.
    ul-Hassan, Jawad
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Karhu, Robin
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Janzén, Erik
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
    Rorsman, Niklas
    Department of Microtechnology and Nanoscience, Chalmers University of Technology, SE-41296 Göteborg, Sweden.
    Low Density of Near-Interface Traps at the Al2O3/4H-SiC Interface with Al2O3 Made by Low Temperature Oxidation of Al2017In: Silicon Carbide and Related Materials 2016, Trans Tech Publications Ltd , 2017, Vol. 897, p. 135-138Conference paper (Refereed)
    Abstract [en]

    We report on a very low density (<5×1011 cm-2) of near-interface traps (NITs) at the Al2O3/4H-SiC interface estimated from capacitance-voltage (CV) analysis of MOS capacitors at different temperatures. The aluminum oxide (Al2O3) is grown by repeated deposition and subsequent low temperature (200°C) oxidation for 5 min of thin (1-2 nm) Al layers using a hot plate. We refer to this simple method as hot plate Al2O3. It is observed that the density of NITs is significantly lower in the hot plate Al2O3 samples than in samples with Al2O3 grown by atomic layer deposition (ALD) at 300°C and in reference samples with thermally grown silicon dioxide grown in O2 or N2O ambient.

  • 9.
    Sveinbjörnsson, Einar
    et al.
    Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology. Science Institute, University of of Iceland, Reykjavík, Iceland.
    Gislason, O.
    Science Institute, University of of Iceland, Reykjavík, Iceland.
    Deep traps in 4H-SiC MOS capacitors investigated by deep level transient spectroscopy2014In: SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2 / [ed] Okumura, H; Harima, H; Kimoto, T; Yoshimoto, M; Watanabe, H; Hatayama, T; Matsuura, H; Funaki, T; Sano, Y, Stafa-Zurich. Switzerland: Trans Tech Publications , 2014, Vol. 778-780, p. 603-606Conference paper (Refereed)
    Abstract [en]

    Using Deep Level Transient Spectroscopy (DLTS) on n-type MOS capacitors we find that thermal oxidation of 4H-SiC produces deep traps at or near the SiO2/SiC interface with two well defined DLTS peaks. The traps are located ~ 0.85 V and ~ 1.0 eV below the SiC conduction band edge and are present in wet and dry oxides as well as oxides produced by sodium enhanced oxidation and oxides grown in N2O. The deep traps are located at the SiO/SiC interface after oxidation at 1150C but do extend further into the SiC epilayer after oxidation at 1240C. We identify these traps as ON1 and ON2 which been observed in epitaxial layers after oxidation at very high temperatures (1200-1500C) [1].

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