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2001 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, E-ISSN 1873-3077, Vol. 77, no 1-2, p. 567-571Article in journal (Refereed) Published
Abstract [en]
The interaction of chemical species with molecular films of porphyrins causes variations of the work function of the film itself, as it has been recently demonstrated by using the Kelvin probe technique. This characteristic makes porphyrins films suitable to be used as sensitive layers in ChemFET sensors. In this paper, we present a preliminary report about the fabrication and testing of such gas sensitive devices. The technological solutions towards an optimised device are also illustrated and discussed. © 2001 Elsevier Science B.V.
Keywords
ChemFET sensor, Palladium gate, Porphyrins films
National Category
Engineering and Technology
Identifiers
urn:nbn:se:liu:diva-47352 (URN)10.1016/S0925-4005(01)00691-8 (DOI)
2009-10-112009-10-112017-12-13