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Lu, Jun
Publications (10 of 136) Show all publications
Shi, Y., Kashiwaya, S., Lu, J., Dahlqvist, M., Sangiovanni, D. G., Rogoz, V., . . . Hultman, L. (2025). Synthesis of Ti4Au3C3 and its derivative trilayer goldene through chemical exfoliation. Science Advances, 11(13)
Open this publication in new window or tab >>Synthesis of Ti4Au3C3 and its derivative trilayer goldene through chemical exfoliation
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2025 (English)In: Science Advances, E-ISSN 2375-2548, Vol. 11, no 13Article in journal (Refereed) Published
Abstract [en]

Achieving large two-dimensional (2D) sheets of any metal is challenging due to their tendency to coalescence or cluster into 3D shapes. Recently, single-atom-thick gold sheets, termed goldene, was reported. Here, we ask if goldene can be extended to include multiple layers. The answer is yes, and trilayer goldene is the magic number, for reasons of electronegativity. Experiments are made to synthesize the atomically laminated phase Ti4Au3C3 through substitutional intercalation of Si layers in Ti4SiC3 for Au. Density functional theory calculations suggest that it is energetically favorable to insert three layers of Au into Ti4SiC3, compared to inserting a monolayer, a bilayer, or more than three layers. Isolated trilayer goldene sheets, ~100 nanometers wide and 6.7 angstroms thick, were obtained by chemically etching the Ti4C3 layers from Ti4Au3C3 templates. Furthermore, trilayer goldene is found in both hcp and fcc forms, where the hcp is ~50 milli–electron volts per atom more stable at room temperature from ab initio molecular dynamic simulations.

Place, publisher, year, edition, pages
American Association for the Advancement of Science (AAAS), 2025
National Category
Condensed Matter Physics
Identifiers
urn:nbn:se:liu:diva-212681 (URN)10.1126/sciadv.adt7999 (DOI)001455518300003 ()40153494 (PubMedID)2-s2.0-105001593083 (Scopus ID)
Note

Funding Agencies|Swedish Research Council [2023- 04107, 2021- 04426, VR- 2018- 05973, 2022- 06725, 2021- 00171]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [SFO- Mat-LiU 2009 00971]; Aforsk Foundation [23- 591, 22- 4]; MIRAI2.0 Joint seed funding; Scandinavia- Japan Sasakawa Foundation; Wallenberg Launchpad (WALP); Olle Engkvist foundation [222- 0053]; Carl Tryggers Stiftelse [CTS 20:150]; Swedish Energy Agency [43606-1]; Carl Tryggers Foundation [CTS23:2746, CTS 20:272, CTS16:303, CTS14:310]; Goran Gustafsson Foundation for Research in Natural Sciences and Medicine; Wallenberg Scholar Grant [2019.0433]; Wallenberg Initiative Materials Science for Sustainability (WISE) - Knut and Alice Wallenberg Foundation

Available from: 2025-03-31 Created: 2025-03-31 Last updated: 2025-04-17
Viskupova, K., Sroba, V., Lu, J., Primetzhofer, D., Wicher, B., Rogoz, V., . . . Greczynski, G. (2025). W-ion irradiation promotes dense TiBx film growth during magnetron sputtering without substrate heating. Surface & Coatings Technology, 497, Article ID 131766.
Open this publication in new window or tab >>W-ion irradiation promotes dense TiBx film growth during magnetron sputtering without substrate heating
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2025 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 497, article id 131766Article in journal (Refereed) Published
Abstract [en]

Lowering energy consumption during thin film growth by magnetron sputtering techniques is essential for future industry as a step towards reaching the United Nations (UN) sustainable development goals. Large potential for energy savings has been shown by employing high-mass metal ion irradiation from targets operated in highpower impulse magnetron sputtering (HiPIMS) mode. With this approach, demonstrated for transition metal (TM) nitrides, thermally-induced adatom mobility is replaced with that supplied by overlapping collisions cascades of low-energy recoils, resulting in a strong reduction of the necessary external heating. Here, the novel method is tested for TiBx, which is a model system for TM-based diborides, another class of promising materials to be used as protective coatings for cutting tools. We show that such films grown with no external substrate heating develop porosity over a wide range of B/Ti ratios. However, (Ti1-yWy)Bx films grown by the hybrid W2B5-HiPIMS/Ti-TiB2-DCMS co-sputtering with substrate bias synchronized to W+/W2+-rich ion fluxes, are dense (without porosity), irrespective of x. Nanoindentation hardness increases from 20 GPa for TiBx to 40 GPa for (Ti1-yWy)Bx. The slightly understoichiometric (Ti0.86W0.14)B1.91 film exhibits super-hardness and is nearly stress-free. These results prove that selected heavy ion irradiation is beneficial for low-temperature growth of hard diboride films, which demonstrates the versatility of this approach and calls for evaluation in other material systems.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA, 2025
Keywords
Thin films; Diboride coatings; Magnetron sputtering; HiPIMS; Low-temperature growth; Ion irradiation
National Category
Other Materials Engineering
Identifiers
urn:nbn:se:liu:diva-211717 (URN)10.1016/j.surfcoat.2025.131766 (DOI)001416729600001 ()2-s2.0-85215109724 (Scopus ID)
Note

Funding Agencies|Swedish Research Council VR-RFI [2009-00971]; Slovak Research and Development Agency [2017-00646_9]; Advancing University Capacity and Competence in Research, Development and Innovation (ACCORD) - European Regional Development Fund [APVV-21-0042]; Polish National Agency for Academic Exchange support under the Bekker grant; Scientific Grant Agency [BPN/BEK/2021/1/00366/U/00001]; VEGA; Wallenberg Initiative Materials Science for Sustain-ability (WISE) - Knut and Alice Wallenberg Foundation [1/0296/22]

Available from: 2025-02-18 Created: 2025-02-18 Last updated: 2025-05-16
Nzulu, G. K., Rogström, L., Lu, J., Högberg, H., Eklund, P., Hultman, L. & Magnuson, M. (2024). Physico-thermal and geochemical behavior and alteration of the Au indicator gangue hydrothermal quartz at the Kubi Gold ore deposits. Journal of African Earth Sciences, 220, Article ID 105439.
Open this publication in new window or tab >>Physico-thermal and geochemical behavior and alteration of the Au indicator gangue hydrothermal quartz at the Kubi Gold ore deposits
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2024 (English)In: Journal of African Earth Sciences, ISSN 1464-343X, E-ISSN 1879-1956, Vol. 220, article id 105439Article in journal (Refereed) Published
Abstract [en]

Altered and gangue quartz in hydrothermal veins from the Kubi Gold deposit in Dunkwa on Offin in the central region of Ghana are investigated for possible Au-associated indicator minerals and to provide the understanding and increase the knowledge of the mineral hosting and alteration processes in quartz. X-ray diffraction, air annealing furnace, differential scanning calorimetry, energy dispersive X-ray spectroscopy, and transmission electron microscopy have been applied on different quartz types outcropping from surface and bedrocks at the Kubi Gold Mining to reveal the material properties at different temperatures. From the diffraction results of the fresh and annealed quartz samples, we find that the samples contain indicator and the impurity minerals iron disulfide, biotite, titanium oxide, and magnetite. These minerals, under oxidation process between 574 and 1400 °C temperatures experienced hematite alterations and a transformation from α-quartz to β-quartz and further to cristobalite as observed from the calorimetry scans for hydrothermally exposed materials. The energy dispersive spectroscopy revealed elemental components of Fe, S, Mg, K, Al, Ti, Na, Si, O, and Ca contained in the samples, and these are attributed to the impurity phase minerals observed in the diffraction. The findings also suggest that during the hydrothermal flow regime, impurity minerals and metals can be trapped by voids and faults. Under favorable temperature conditions, the trapped minerals can be altered to change color at different depositional stages by oxidation and reduction processes leading to hematite alteration which is a useful indicator minerals in mineral exploration.

Place, publisher, year, edition, pages
Elsevier BV, 2024
Keywords
Quartz; Hydrothermal; Indicator minerals; Hematite; X-ray diffraction; Crystal structure; Defects
National Category
Geology
Identifiers
urn:nbn:se:liu:diva-208386 (URN)10.1016/j.jafrearsci.2024.105439 (DOI)001332967800001 ()
Funder
Carl Tryggers foundation Swedish Research CouncilSwedish Energy Agency
Note

Funding Agencies|Swedish Government Strategic Research Area in Ma-terials Science on Functional Materials at Linköping University [2009 00971]; Swedish Energy Research [43606-1]; Carl Tryggers Foundation [CTS23:2746, CTS20:272, CTS16:303, CTS14:310]

Available from: 2024-10-10 Created: 2024-10-10 Last updated: 2024-10-30
Kashiwaya, S., Shi, Y., Lu, J., Sangiovanni, D. G., Greczynski, G., Magnuson, M., . . . Hultman, L. (2024). Synthesis of goldene comprising single-atom layer gold. Nature Synthesis, 3(6), 744-751
Open this publication in new window or tab >>Synthesis of goldene comprising single-atom layer gold
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2024 (English)In: Nature Synthesis, E-ISSN 2731-0582, Vol. 3, no 6, p. 744-751Article in journal (Refereed) Published
Abstract [en]

The synthesis of monolayer gold has so far been limited to free-standingseveral-atoms-thick layers, or monolayers confned on or inside templates.Here we report the exfoliation of single-atom-thick gold achieved throughwet-chemically etching away Ti3C2 from nanolaminated Ti3AuC2, initiallyformed by substituting Si in Ti3SiC2 with Au. Ti3SiC2 is a renown MAX phase,where M is a transition metal, A is a group A element, and X is C or N. Ourdeveloped synthetic route is by a facile, scalable and hydrofuoric acid-freemethod. The two-dimensional layers are termed goldene. Goldene layerswith roughly 9% lattice contraction compared to bulk gold are observedby electron microscopy. While ab initio molecular dynamics simulationsshow that two-dimensional goldene is inherently stable, experiments showsome curling and agglomeration, which can be mitigated by surfactants.X-ray photoelectron spectroscopy reveals an Au 4f binding energy increaseof 0.88 eV. Prospects for preparing goldene from other non-van der WaalsAu-intercalated phases, including developing etching schemes,are presented.

Place, publisher, year, edition, pages
Nature Publishing Group, 2024
National Category
Condensed Matter Physics
Identifiers
urn:nbn:se:liu:diva-202582 (URN)10.1038/s44160-024-00518-4 (DOI)001203366300001 ()2-s2.0-85190684420 (Scopus ID)
Note

Funding agencies: the Swedish Research Council project grant nos. 2017-03909 (L.H.), 2023-04107 (L.H.) and 2021-04426 (D.G.S.), Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linköping University grant no. SFO-Mat-LiU 2009 00971, Wallenberg Scholar Program grant no. KAW 2019.0290 (L.H.), the Swedish Research Council through grant agreement nos. VR-2018-05973 and 2022-06725, MIRAI2.0, Åforsk Foundation grant no. 22-4, the Olle Engkvist foundation grant no. 222-0053, Carl Tryggers Stiftelse contract no. CTS 20:150, Swedish Energy Agency (grant no. 43606-1), Carl Tryggers Foundation (grant nos. CTS23:2746, CTS 20:272, CTS16:303, CTS14:310)and Göran Gustafsson Foundation for Research in Natural Sciences and Medicines.

Available from: 2024-04-17 Created: 2024-04-17 Last updated: 2025-02-06Bibliographically approved
Shu, R., Han, Z., Elsukova, A., Zhu, Y., Qin, P., Jiang, F., . . . Liu, W. (2022). Solid-State Janus Nanoprecipitation Enables Amorphous-Like Heat Conduction in Crystalline Mg3Sb2-Based Thermoelectric Materials. Advanced Science, 9(25), Article ID 2202594.
Open this publication in new window or tab >>Solid-State Janus Nanoprecipitation Enables Amorphous-Like Heat Conduction in Crystalline Mg3Sb2-Based Thermoelectric Materials
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2022 (English)In: Advanced Science, E-ISSN 2198-3844, Vol. 9, no 25, article id 2202594Article in journal (Refereed) Published
Abstract [en]

Solid-state precipitation can be used to tailor material properties, ranging from ferromagnets and catalysts to mechanical strengthening and energy storage. Thermoelectric properties can be modified by precipitation to enhance phonon scattering while retaining charge-carrier transmission. Here, unconventional Janus-type nanoprecipitates are uncovered in Mg3Sb1.5Bi0.5 formed by side-by-side Bi- and Ge-rich appendages, in contrast to separate nanoprecipitate formation. These Janus nanoprecipitates result from local comelting of Bi and Ge during sintering, enabling an amorphous-like lattice thermal conductivity. A precipitate size effect on phonon scattering is observed due to the balance between alloy-disorder and nanoprecipitate scattering. The thermoelectric figure-of-merit ZT reaches 0.6 near room temperature and 1.6 at 773 K. The Janus nanoprecipitation can be introduced into other materials and may act as a general property-tailoring mechanism.

Place, publisher, year, edition, pages
Wiley, 2022
Keywords
atom probe tomography; Janus nanoprecipitation; low thermal conductivity; Mg3Sb2; thermalelectrics
National Category
Other Chemical Engineering
Identifiers
urn:nbn:se:liu:diva-187372 (URN)10.1002/advs.202202594 (DOI)000826658200001 ()35851767 (PubMedID)
Note

Funding Agencies|National Key Research and Development Program of China [2018YFB0703600]; National Natural Science Foundation of China [51872133]; Guangdong Innovative and Entrepreneurial Research Team Program [2016ZT06G587]; Guangdong Provincial Key Laboratory Program from the Department of Science and Technology of Guangdong Province [2021B1212040001]; Tencent Foundation through the XPLORER PRIZE; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009 00971]; Knut and Alice Wallenberg foundation through the Wallenberg Academy Fellows program [KAW-2020.0196]; Swedish Foundation for Strategic Research (SSF) [RIF 14-0074]; German Science Foundation (DFG) [SFB 917]

Available from: 2022-08-19 Created: 2022-08-19 Last updated: 2023-12-28Bibliographically approved
Xin, B., Le Febvrier, A., Lu, J., Paul, B. & Eklund, P. (2022). Synthesis of textured discontinuous-nanoisland Ca3Co4O9 thin films. Nanoscale Advances, 4, 3318-3322
Open this publication in new window or tab >>Synthesis of textured discontinuous-nanoisland Ca3Co4O9 thin films
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2022 (English)In: Nanoscale Advances, E-ISSN 2516-0230, Vol. 4, p. 3318-3322Article in journal (Refereed) Published
Abstract [en]

Controllable engineering of the nanoporosity in layered Ca3Co4O9 remains a challenge. Here, we show the synthesis of discontinuous films with islands of highly textured Ca3Co4O9, effectively constituting distributed nanoparticles with controlled porosity and morphology. These discontinuously dispersed textured Ca3Co4O9 nanoparticles may be a candidate for hybrid thermoelectrics.

Place, publisher, year, edition, pages
Royal Society of Chemistry, 2022
National Category
Polymer Chemistry
Identifiers
urn:nbn:se:liu:diva-187438 (URN)10.1039/d2na00373b (DOI)000823803700001 ()
Available from: 2022-08-23 Created: 2022-08-23 Last updated: 2023-08-17Bibliographically approved
Bakhit, B., Mráz, S., Lu, J., Rosén, J., Schneider, J. M., Hultman, L., . . . Greczynski, G. (2021). Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating. Vacuum, 186, Article ID 110057.
Open this publication in new window or tab >>Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating
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2021 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 186, article id 110057Article in journal (Refereed) Published
Abstract [en]

There is a need for developing synthesis techniques that allow the growth of high-quality functional films at low substrate temperatures to minimize energy consumption and enable coating temperature-sensitive substrates. A typical shortcoming of conventional low-temperature growth strategies is insufficient atomic mobility, which leads to porous microstructures with impurity incorporation due to atmosphere exposure, and, in turn, poor mechanical properties. Here, we report the synthesis of dense Ti0.67Hf0.33B1.7 thin films with a hardness of ∼41.0 GPa grown without external heating (substrate temperature below ∼100 °C) by hybrid high-power impulse and dc magnetron co-sputtering (HfB2-HiPIMS/TiB2-DCMS) in pure Ar on Al2O3(0001) substrates. A substrate bias potential of −300 V is synchronized to the target-ion-rich portion of each HiPIMS pulse. The limited atomic mobility inherent to such desired low-temperature deposition is compensated for by heavy-mass ion (Hf+) irradiation promoting the growth of dense Ti0.67Hf0.33B1.7.

Place, publisher, year, edition, pages
Elsevier, 2021
Keywords
Thin films, Borides, Low-temperature sputter deposition, Hybrid HiPIMS/DCMS, Hardness
National Category
Ceramics and Powder Metallurgical Materials
Identifiers
urn:nbn:se:liu:diva-172653 (URN)10.1016/j.vacuum.2021.110057 (DOI)000620647100008 ()
Funder
Knut and Alice Wallenberg Foundation, KAW 2015.0043Swedish Research Council, 2018-03957, 642-2013-8020Vinnova, 2019-04882Swedish Energy Agency, 51201-1Carl Tryggers foundation , CTS 15:219, CTS 17:166, CTS 14:431Linköpings universitet, 2009 00971Swedish Research Council, #2017-00646_9Swedish Foundation for Strategic Research , RIF14-0053, RIF14-0074
Note

Additional funding agencies: German Science Foundation (DFG) : SCHN735/42-1.

Available from: 2021-01-15 Created: 2021-01-15 Last updated: 2025-02-09Bibliographically approved
Bakhit, B., Dorri, S., Kooijman, A., Wu, Z., Lu, J., Rosén, J., . . . Greczynski, G. (2021). Multifunctional ZrB2-rich Zr1-xCrxBy thin films with enhanced mechanical, oxidation, and corrosion properties. Vacuum, 185, Article ID 109990.
Open this publication in new window or tab >>Multifunctional ZrB2-rich Zr1-xCrxBy thin films with enhanced mechanical, oxidation, and corrosion properties
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2021 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 185, article id 109990Article in journal (Refereed) Published
Abstract [en]

Refractory transition-metal (TM) diborides have high melting points, excellent hardness, and good  chemical  stability.  However, these properties are not sufficient for applications involving extreme  environments that require high mechanical strength as well as oxidation and corrosion resistance. Here, we study the effect of Cr addition on the properties of ZrB2-rich Zr1-xCrxBy thin films grown by hybrid high-power impulse and dc magnetron co-sputtering (Cr-HiPIMS/ZrB2-DCMS) with a 100-V Cr-metal-ion synchronized potential. Cr metal fraction, x = Cr/(Zr+Cr), is increased from 0.23 to 0.44 by decreasing the power Pzrb2 applied to the DCMS ZrB2 target from 4000 to 2000 W, while the average power, pulse width, and frequency applied to the HiPIMS Cr target are maintained constant. In addition, y decreases from 2.18 to 1.11 as a function of Pzrb2, as a result of supplying Cr to the growing film and preferential B resputtering caused by the pulsed Cr-ion flux. ZrB2.18, Zr0.77Cr0.23B1.52, Zr0.71Cr0.29B1.42, and Zr0.68Cr0.32B1.38 2 films have hexagonal AlB2 crystal structure with a columnar nanostructure, while Zr0.64Cr0.36B1.30 and Zr0.56Cr0.44B1.11 are  amorphous. All films show hardness above 30 GPa. Zr0.56Cr0.44B1.11 alloys exhibit much better toughness, wear, oxidation, and corrosion resistance than ZrB2.18. This combination of properties   makes Zr0.56Cr0.44B1.11 ideal candidates for numerous strategic applications.

Keywords
Thin films, Transition-metal (TM) diborides, Mechanical properties, Wear, Oxidation, Corrosion
National Category
Inorganic Chemistry
Identifiers
urn:nbn:se:liu:diva-171888 (URN)10.1016/j.vacuum.2020.109990 (DOI)000618239100003 ()
Note

Funding agencies: We acknowledge support from the Knut and Alice Wallenberg (KAW) foundation for Project funding (KAW 2015.0043). Financial support from the Swedish Research Council VR Grant 2018–03957 and 642-2013-8020, the VINNOVA Grant 2019–04882, and Carl Tryggers Stiftelse contracts CTS 15:219, CTS 17:166, and CTS 14:431 are also gratefully acknowledged. Furthermore, the authors acknowledge financial support from the Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linköping University (Faculty Grant SFO Mat LiU No. 2009 00971). Supports from the Swedish research council VR-RFI (#2017–00646_9) for the Accelerator based ion-technological center and from the Swedish Foundation for Strategic Research (contract RIF14-0053; for the tandem accelerator laboratory in Uppsala University, and contract RIF14-0074; for the electron microscopy laboratory) are acknowledged.

Available from: 2020-12-11 Created: 2020-12-11 Last updated: 2021-12-28
Xu, Q., Zhou, Y., Zhang, H., Jiang, A., Tao, Q., Lu, J., . . . Hu, C. (2020). Theoretical prediction, synthesis, and crystal structure determination of new MAX phase compound V2SnC. JOURNAL OF ADVANCED CERAMICS, 9(4), 481-492
Open this publication in new window or tab >>Theoretical prediction, synthesis, and crystal structure determination of new MAX phase compound V2SnC
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2020 (English)In: JOURNAL OF ADVANCED CERAMICS, ISSN 2226-4108, Vol. 9, no 4, p. 481-492Article in journal (Refereed) Published
Abstract [en]

Guided by the theoretical prediction, a new MAX phase V2SnC was synthesized experimentally for the first time by reaction of V, Sn, and C mixtures at 1000 degrees C. The chemical composition and crystal structure of this new compound were identified by the cross-check combination of first-principles calculations, X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDS), and high resolution scanning transmission electron microscopy (HR-STEM). The stacking sequence of V2C and Sn layers results in a crystal structure of space group P6(3)/mmc. Thea- andc-lattice parameters, which were determined by the Rietveld analysis of powder XRD pattern, are 0.2981(0) nm and 1.3470(6) nm, respectively. The atomic positions are V at 4f (1/3, 2/3, 0.0776(5)), Sn at 2d (2/3, 1/3, 1/4), and C at 2a (0, 0, 0). A new set of XRD data of V2SnC was also obtained. Theoretical calculations suggest that this new compound is stable with negative formation energy and formation enthalpy, satisfied Born-Huang criteria of mechanical stability, and positive phonon branches over the Brillouin zone. It also has low shear deformation resistancec(44)(second-order elastic constant,c(ij)) and shear modulus (G), positive Cauchy pressure, and low Pughs ratio (G/B= 0.500 < 0.571), which is regarded as a quasi-ductile MAX phase. The mechanism underpinning the quasi-ductility is associated with the presence of a metallic bond.

Place, publisher, year, edition, pages
SPRINGER, 2020
Keywords
V2SnC; new MAX phase compound; crystal structure; first-principles calculations
National Category
Inorganic Chemistry
Identifiers
urn:nbn:se:liu:diva-168274 (URN)10.1007/s40145-020-0391-8 (DOI)000553632100002 ()2-s2.0-85088555134 (Scopus ID)
Note

Funding Agencies|Thousand Talents Program of Sichuan Province; Open Project of State Key Laboratory Cultivation Base for Nonmetal Composites and Functional Materials [17kffk01]; Outstanding Young Scientific and Technical Talents in Sichuan Province [2019JDJQ0009]; National Natural Science Foundation of ChinaNational Natural Science Foundation of China [51741208]

Available from: 2020-08-21 Created: 2020-08-21 Last updated: 2025-08-19Bibliographically approved
Magnuson, M., Tengdelius, L., Greczynski, G., Eriksson, F., Jensen, J., Lu, J., . . . Högberg, H. (2019). Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target. Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 37(2), Article ID 021506.
Open this publication in new window or tab >>Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target
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2019 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 37, no 2, article id 021506Article in journal (Refereed) Published
Abstract [en]

The authors investigate sputtering of a Ti3SiC2 compound target at temperatures ranging from RT (no applied external heating) to 970 °C as well as the influence of the sputtering power at 850 °C for the deposition of Ti3SiC2 films on Al2O3(0001) substrates. Elemental composition obtained from time-of-flight energy elastic recoil detection analysis shows an excess of carbon in all films, which is explained by differences in the angular distribution between C, Si, and Ti, where C scatters the least during sputtering. The oxygen content is 2.6 at. % in the film deposited at RT and decreases with increasing deposition temperature, showing that higher temperatures favor high purity films. Chemical bonding analysis by x-ray photoelectron spectroscopy shows C–Ti and Si–C bonding in the Ti3SiC2 films and Si–Si bonding in the Ti3SiC2 compound target. X-ray diffraction reveals that the phases Ti3SiC2, Ti4SiC3, and Ti7Si2C5 can be deposited from a Ti3SiC2 compound target at substrate temperatures above 850 °C and with the growth of TiC and the Nowotny phase Ti5Si3Cx at lower temperatures. High-resolution scanning transmission electron microscopy shows epitaxial growth of Ti3SiC2, Ti4SiC3, and Ti7Si2C5 on TiC at 970 °C. Four-point probe resistivity measurements give values in the range ∼120 to ∼450 μΩ cm and with the lowest values obtained for films containing Ti3SiC2, Ti4SiC3, and Ti7Si2C5.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2019
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-154004 (URN)10.1116/1.5065468 (DOI)000460437200051 ()
Note

Funding agencies: Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009-00971]; Swedish Energy Research [43606-1]; Carl Tryggers Foundation [CTS16:303, CTS14:310, CTS 17:166]; Knut 

Available from: 2019-01-22 Created: 2019-01-22 Last updated: 2019-03-20Bibliographically approved
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