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Site-Controlled Growth of GaN Nanorods with Inserted InGaN Quantum Wells on mu-Cone Patterned Sapphire Substrates by Plasma-Assisted MBE
Ioffe Inst, Russia.
Ioffe Inst, Russia.
Ioffe Inst, Russia.
Ioffe Inst, Russia.
Vise andre og tillknytning
2018 (engelsk)Inngår i: Semiconductors (Woodbury, N.Y.), ISSN 1063-7826, E-ISSN 1090-6479, Vol. 52, nr 5, s. 667-670Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

We report on a new approach to fabricate regular arrays of GaN nanorods (NRs) with InGaN QWs by plasma-assisted molecular-beam epitaxy (PA MBE) on micro-cone patterned sapphire substrates (mu-CPSSs). A two-stage PA MBE fabrication process of GaN NRs has been developed, starting with a high temperature nucleation layer growth at metal-rich conditions to aggregate selectively GaN nucleus on c-oriented areas of the mu-CPSSs and followed by growth of 1-mu m-thick GaN NRs at strongly nitrogen-rich conditions exactly on the cone tips. These results are explained by energetically favorable GaN growth on the (000 (1) over bar) oriented sapphire surface. Both micro-photoluminescence and micro-cathodoluminescence confirm the formation of regular array of optically and spectrally isolated NRs without usage of any nanolithography.

sted, utgiver, år, opplag, sider
MAIK NAUKA/INTERPERIODICA/SPRINGER , 2018. Vol. 52, nr 5, s. 667-670
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Identifikatorer
URN: urn:nbn:se:liu:diva-147793DOI: 10.1134/S1063782618050123ISI: 000430311300032OAI: oai:DiVA.org:liu-147793DiVA, id: diva2:1206492
Konferanse
25th International Symposium on Nanostructures - Physics and Technology
Merknad

Funding Agencies|Russian Science Foundation [14-22-00107]

Tilgjengelig fra: 2018-05-17 Laget: 2018-05-17 Sist oppdatert: 2018-05-17

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