This paper presents an application of the Sigma Delta modulation technique to the on-chip dynamic test for analog-to-digital converters (ADCs). The required stimulus such as a single- or two-tone signal is encoded into one-bit Sigma Delta sequence, which is applied to an ADC under test through a driving buffer and a simple low-pass reconstruction filter. By a systematic approach, we select the order and type of a Sigma Delta modulator and develop a frequency plan suitable for the spectral measurement. In this way, we achieve a high dynamic range suitable for spectral harmonic and intermodulation distortion tests for ADCs. For high frequency measurements (up to the Nyquist frequency), we propose a novel low-pass/band-pass modulation scheme that allows to avoid harmful effects of the low-frequency quantization noise. Also we address the distortion components which originate from the buffer imperfections for a nonreturn-to-zero waveform representing the encoded stimulus. We show that the low-frequency distortion components can be cancelled by using a simple iterative predistortion technique supported by measurements with a DC-calibrated ADC. By correlation between low- and high-frequency components also the high frequency distortions can be largely reduced. The presented techniques are illustrated by simulation results of an ADC under test.