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Return-path ellipsometry in gas sensing
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi.
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad optik.ORCID-id: 0000-0001-9229-2028
2003 (engelsk)Inngår i: Measurement science and technology, ISSN 0957-0233, E-ISSN 1361-6501, Vol. 15, s. 216-220Artikkel i tidsskrift (Fagfellevurdert) Published
sted, utgiver, år, opplag, sider
2003. Vol. 15, s. 216-220
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-41365DOI: 10.1088/0957-0233/15/1/030Lokal ID: 55713OAI: oai:DiVA.org:liu-41365DiVA, id: diva2:262217
Tilgjengelig fra: 2009-10-10 Laget: 2009-10-10 Sist oppdatert: 2021-09-27
Inngår i avhandling
1. Gas Sensing Based on Ellipsometric Readout: Methodology and Development
Åpne denne publikasjonen i ny fane eller vindu >>Gas Sensing Based on Ellipsometric Readout: Methodology and Development
2003 (engelsk)Doktoravhandling, med artikler (Annet vitenskapelig)
Abstract [en]

The concept of an ellipsometric sensor array system - "an optical nose" - is presented. The system is used to monitor and discriminate gases. The optical readout is based on polarizer-compensator-sample-analyzer (PCSA) off-null ellipsometry. Thin porous silicon sensing layers with and without surface chemical modifications are used to measure low concentration methanol, ethanol and 2-propanol gases. The main contents of the thesis are:

- Principle and construction of a prototype PCSA ellipsometric gas sensor system.

- Optimization of the azimuth angle settings of the optical components in PCSA off-null ellipsometry to obtain the maximum readout sensitivity.

- Application of return-path off-null ellipsometry in gas sensing as an alternative way to construct ellipsometric gas sensors.

- Modification of porous silicon sensing layers by copper deposition to obtain different gas sensitivity for the enhancement of selectivity.

- Multi-sensing concept of the optical nose to detect and discriminate alcohols using porous silicon sensing layers and pattern recognition techniques.

So far, a prototype PCSA ellipsometric gas sensor system has been constructed and tested. Low concentration methanol, ethanol and 2-propanol vapors are detected and discriminated based on the PCSA off-null ellipsometric gas sensor system and porous silicon sensing layers.

sted, utgiver, år, opplag, sider
Linköping: Linköping University, 2003. s. 32
Serie
Linköping Studies in Science and Technology. Dissertations, ISSN 0345-7524 ; 826
HSV kategori
Identifikatorer
urn:nbn:se:liu:diva-177914 (URN)9173736597 (ISBN)
Disputas
2003-05-27, Planck, Fysikhuset, Campus Valla, Linköping, 10:15 (engelsk)
Opponent
Merknad

All or some of the partial works included in the dissertation are not registered in DiVA and therefore not linked in this post.

Tilgjengelig fra: 2021-07-07 Laget: 2021-07-07 Sist oppdatert: 2023-03-01bibliografisk kontrollert

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