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Enlarging the usable growth area in a hot-wall silicon carbide CVD reader by using simulation
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi, Halvledarmaterial.
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi, Halvledarmaterial.ORCID-id: 0000-0001-5768-0244
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi, Halvledarmaterial.
2001 (engelsk)Inngår i: Materials Science Forum, Vols. 353-356, 2001, Vol. 353-3, s. 99-102Konferansepaper, Publicerat paper (Fagfellevurdert)
Abstract [en]

The chemical vapor deposition (CVD) growth of large area silicon car-bide epitaxial layers with homogeneous properties requires a large area with homogeneous temperature in the CVD reactor. In the present work we show that by changing the design of the CVD reactor, but keeping the overall dimension the same, this area can be enlarged by at least a factor of three.. By using a simulation tool new designs can be tried out and optimized in the computer before testing them in practice. The simulation is set up as a 2D axisymmetric problem and validation is made in a 2D horizontal hot-wall CVD reactor. Very good agreements between simulated and measured results are obtained. The zone with a temperature variation of less than 5 degrees at an operating temperature of 1650 degreesC increased to 64% of the whale susceptor length. In addition, the power input needed to reach the operating temperature decreased by 15%.

sted, utgiver, år, opplag, sider
2001. Vol. 353-3, s. 99-102
Emneord [en]
CVD, epitaxial growth, simulation, temperature distribution
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-49261OAI: oai:DiVA.org:liu-49261DiVA, id: diva2:270157
Konferanse
ECSCRM2000
Tilgjengelig fra: 2009-10-11 Laget: 2009-10-11 Sist oppdatert: 2014-10-08

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