Low Temperature Photoluminescence Investigation of 3-Inch SiC Wafers for Power Device ApplicationsVise andre og tillknytning
2012 (engelsk)Inngår i: HeteroSiC & WASMPE 2011, 2012, Vol. 711, s. 164-168Konferansepaper, Publicerat paper (Fagfellevurdert)
Resurstyp
Text
Abstract [en]
Focusing on the change in aluminium-related photoluminescence lines in 4H-SiC versus doping concentration, we have used a combination of LTPL (Low Temperature PhotoLuminescence) and secondary ion mass spectrometry measurements to set new calibration curves. In this way, one can probe the change in aluminum concentration in the range 1017 to 1019 cm-3. When applied to LTPL maps collected on full 3-inch wafers, we show that such abacuses constitute a powerful tool to control efficiently the doping level of as-grown p+ (emitters) and p++ (contact) layers for power device applications.
sted, utgiver, år, opplag, sider
2012. Vol. 711, s. 164-168
Serie
Materials Science Forum, ISSN 0255-5476
Emneord [en]
Hot-Wall CVD, Low Temperature Photoluminescence, Al Doping, 4H-SiC
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-128853DOI: 10.4028/www.scientific.net/MSF.711.164OAI: oai:DiVA.org:liu-128853DiVA, id: diva2:932662
Konferanse
HeteroSiC & WASMPE 2011
2016-06-022016-06-022021-12-29