Open this publication in new window or tab >>Show others...
2019 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 125, no 10, article id 105301Article in journal (Refereed) Published
Abstract [en]
Heteroepitaxial c-(Ti-0.37,Al-0.63)N thin films were grown on MgO(001) and MgO(111) substrates using reactive magnetron sputtering. High resolution high-angle annular dark-field scanning transmission electron micrographs show coherency between the film and the substrate. In the as-deposited state, x-ray diffraction reciprocal space maps show a strained epitaxial film. Corresponding geometric phase analysis (GPA) deformation maps show a high stress in the film. At elevated temperature (900 degrees C), the films decompose to form iso-structural coherent c-Al- and c-TiN-rich domains, elongated along the elastically soft amp;lt;100amp;gt; directions. GPA analysis reveals that the c-TiN domains accommodate more dislocations than the c-AlN domains. This is because of the stronger directionality of the covalent bonds in c-AlN compared with c-TiN, making it more favorable for the dislocations to accumulate in c-TiN. The defect structure and strain generation in c-(Ti,Al)N during spinodal decomposition is affected by the chemical bonding state and elastic properties of the segregated domains.
Place, publisher, year, edition, pages
AMER INST PHYSICS, 2019
National Category
Inorganic Chemistry
Identifiers
urn:nbn:se:liu:diva-155889 (URN)10.1063/1.5051609 (DOI)000461370200022 ()
Note
Funding Agencies|European Unions Erasmus Mundus doctoral program in Materials Science and Engineering (DocMASE); Swedish Research Council [621-2012-4401]; Swedish government strategic research area grant AFM-SFO MatLiU [2009-00971]; VINNOVA (FunMat-II project) [2016-05156]; VINNOVA (M-ERA. net project MC2) [2013-02355]; German Research Foundation (DFG); Federal State Government of Saarland, Germany [INST 256/298-1 FUGG]
2019-04-032019-04-032019-05-27