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The Origin and Formation Mechanism of an Inclined Line-like Defect in 4H-SiC Epilayers
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-1969-3324
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-9537-2226
2022 (English)In: Physica Status Solidi (B): Basic Solid State Physics, ISSN 0370-1972, E-ISSN 1521-3951, Vol. 259, no 4, article id 2100512Article in journal (Refereed) Published
Abstract [en]

The origin and the formation mechanism of a surface morphological defect in 4H-SiC epilayers are reported. The defect appears on the surface of an epilayer as an inclined line-like feature at an angle of +/- 80 degrees to the step-flow direction [ 11 2 over bar 0 ] . The defect is confirmed to originate from a threading screw dislocation intersecting the surface and its orientation is controlled by the sign of the Burgers vector of the dislocation. The defect forms through the interaction of local spiral growth associated with threading screw dislocations and step-flow growth related to the substrate offcut. The defect mainly appears in the epilayers grown through chloride-based chemistry, where in situ surface preparation of the substrate is performed in H-2 + HCl at a relatively high temperature.

Place, publisher, year, edition, pages
Wiley-V C H Verlag GMBH , 2022. Vol. 259, no 4, article id 2100512
Keywords [en]
Burgers vectors; dislocations; epitaxy; spiral growth; step-flow growth; surface morphological defects; X-ray topography
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-182621DOI: 10.1002/pssb.202100512ISI: 000745486100001Scopus ID: 2-s2.0-85123468538OAI: oai:DiVA.org:liu-182621DiVA, id: diva2:1634012
Note

Funding Agencies|Swedish Energy Agency Energimyndigheten project [43611-1]

Available from: 2022-02-01 Created: 2022-02-01 Last updated: 2026-06-12Bibliographically approved

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Karhu, RobinGhezellou, Misaghul-Hassan, Jawad

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