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Oxidation kinetics of overstoichiometric TiB2 thin films grown by DC magnetron sputtering
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0003-3203-7935
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-4898-5115
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. University of Illinois at Urbana-Champaign, USA; National Taiwan University of Science and Technology, Taiwan.ORCID iD: 0000-0002-2955-4897
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2022 (English)In: Corrosion Science, ISSN 0010-938X, E-ISSN 1879-0496, Vol. 206, article id 110493Article in journal (Refereed) Published
Abstract [en]

We systematically study the oxidation properties of sputter-deposited TiB2.5 coatings up to 700 °C. Oxide-scale thickness dox increases linearly with time ta for 300, 400, 500, and 700 °C, while an oxidation-protective behavior occurs with dox=250∙ta0.2 at 600 °C. Oxide-layer’s structure changes from amorphous to rutile/anatase-TiO2 at temperatures ≥ 500 °C. Abnormally low oxidation rate at 600 °C is attributed to a highly dense columnar TiO2-sublayer growing near oxide/film interface with a top-amorphous thin layer, suppressing oxygen diffusion. A model is proposed to explain the oxide-scale evolution at 600 °C. Decreasing heating rate to 1.0 °C/min plays a noticeable role in the TiB2.5 oxidation.

Place, publisher, year, edition, pages
Pergamon-Elsevier Science Ltd , 2022. Vol. 206, article id 110493
Keywords [en]
Sputtering, Thin films, Titanium diboride (TiB), Microstructure, Oxidation
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-188286DOI: 10.1016/j.corsci.2022.110493ISI: 000842008100003OAI: oai:DiVA.org:liu-188286DiVA, id: diva2:1694245
Note

Funding: Swedish Research Council VR [2018-03957, 2019-00191, 2021-00357]; Swedish Foundation for Strategic Research (SSF); Swedish Government Strategic Research Area in Materials Science on Advanced Functional Materials (AFM) at Link o ?; ping University (Faculty Grant SFO Mat LiU) [2009 00971]; Swedish National Graduate School in Neutron Scattering (SwedNess); Knut and Alice Wallenberg Foundation [KAW 2015.0043]

Available from: 2022-09-08 Created: 2022-09-08 Last updated: 2022-10-07

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Dorri, SamiraPalisaitis, JustinasGreczynski, GrzegorzPetrov, IvanBirch, JensHultman, LarsBakhit, Babak

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