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Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-9630-7071
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-6602-7981
Uppsala Univ, Sweden.
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2023 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 41, no 5, article id 053415Article in journal (Refereed) Published
Abstract [en]

Low-temperature epitaxial growth of multicomponent alloy-based thin films remains an outstanding challenge in materials science and is important for established fundamental properties of these complex materials. Here, Cantor nitride (CrMnFeCoNi)N thin films were epitaxially grown on MgO(100) substrates at low deposition temperature by magnetic-field-assisted dc-magnetron sputtering, a technique where a magnetic field is applied to steer the dense plasma to the substrate thereby influencing the flux of Ar-ions bombarding the film during growth. Without ion bombardment, the film displayed textured growth. As the ion flux was increased, the films exhibited epitaxial growth. The epitaxial relationship between film and substrate was found to be cube on cube (001)film parallel to(001)MgO, [100]film parallel to[100]MgO. The epitaxy was retained up to a thickness of approximately similar to 100 nm after which the growth becomes textured with a 002 out-of-plane orientation. The elastic constants determined by Brillouin inelastic light scattering were found to be C-11 = 320 GPa, C-12 = 125 GPa, and C-44 = 66 GPa, from which the polycrystalline Youngs modulus was calculated as 204 GPa and Poissons ratio = 0.32, whereas available elastic properties still remained very scarce. (c) 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

Place, publisher, year, edition, pages
A V S AMER INST PHYSICS , 2023. Vol. 41, no 5, article id 053415
National Category
Condensed Matter Physics
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URN: urn:nbn:se:liu:diva-197862DOI: 10.1116/6.0002947ISI: 001058150700001OAI: oai:DiVA.org:liu-197862DiVA, id: diva2:1798199
Note

Funding Agencies|VINNOVA Competence Centre FunMat-II; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkouml;ping University; Knut and Alice Wallenberg foundation through the Wallenberg Academy Fellows program; Swedish Research Council (VR); Swedish Research Council VR-RFI; [2016-05156]; [2009 00971]; [KAW-2020.0196]; [2021-03826]; [2019_00191]

Available from: 2023-09-18 Created: 2023-09-18 Last updated: 2024-02-12

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Gangaprasad Rao, SmitaIllgner, Pascal ManuelBoyd, RobertPetrov, IvanLe Febvrier, ArnaudEklund, Per
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