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Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0003-0221-9391
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-5879-3264
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-6371-0638
Uppsala Univ, Sweden.
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2023 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 41, no 6, article id 063402Article in journal (Refereed) Published
Abstract [en]

NiO thin films with varied oxygen contents are grown on Si(100) and c-Al2O3 at a substrate temperature of 300 degrees C using pulsed dc reactive magnetron sputtering. We characterize the structure and optical properties of NiO changes as functions of the oxygen content. NiO with the cubic structure, single phase, and predominant orientation along (111) is found on both substrates. X-ray diffraction and pole figure analysis further show that NiO on the Si(100) substrate exhibits fiber-textured growth, while twin domain epitaxy was achieved on c-Al2O3, with NiO(111) k Al2O3(0001) and NiO[1 (1) over bar0]k Al2O3[10 (1) over bar0] or NiO[(1) over bar 10]k Al2O3[2 (1) over bar(1) over bar0] epitaxial relationship. The oxygen content in NiO films did not have a significant effect on the refractive index, extinction coefficient, and absorption coefficient. This suggests that the optical properties of NiO films remained unaffected by changes in the oxygen content.

Place, publisher, year, edition, pages
A V S AMER INST PHYSICS , 2023. Vol. 41, no 6, article id 063402
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-198654DOI: 10.1116/6.0002914ISI: 001069881900002OAI: oai:DiVA.org:liu-198654DiVA, id: diva2:1806574
Note

Funding Agencies|This work was supported financially by the Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkping University (Faculty Grant SFO-Mat-LiU No. 2009 00971), the Knut and Alice Wallenberg Foundation through the [2009 00971]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoeping University; Knut and Alice Wallenberg Foundation [2009 00971]; Swedish Research Council (VR) [KAW-2020.0196]; Swedish Energy Agency [2021-03826]; VR-RFI [46519-1]; Swedish Foundation for Strategic Research (SSF) [2019-00191]; [RIF14-0053]

Available from: 2023-10-23 Created: 2023-10-23 Last updated: 2024-03-18

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Alijan Farzad Lahiji, FaezehBairagi, SamiranMagnusson, RogerEkström, ErikPaul, BiplabLe Febvrier, ArnaudEklund, Per
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