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Engineering Electrical Transport by Implantation-Induced Defects in CrN Films Without Affecting Thermal Conductivity
Univ Poitiers, France; Oak Ridge Natl Lab, TN 37831 USA.
Univ Poitiers, France.
Univ Paris Saclay, France.
Sorbonne Univ, France.
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2025 (English)In: Advanced Materials Interfaces, ISSN 2196-7350, Vol. 12, no 22, article id e00436Article in journal (Refereed) Published
Abstract [en]

The transport properties of CrN thin films deposited on sapphire have been tailored through structural modifications induced by cumulative argon implantation. As-grown samples experience the typical structural transition in CrN films from orthorhombic at low temperature to cubic above the N & eacute;el temperature (approximate to 280 K) and exhibit a metallic-like conduction in both phases. With increasing implantation dose, the conduction mode shifts to a semiconductor-like behavior in both phases, albeit at different damage levels. Analysis of the results suggests that hopping conduction becomes dominant beyond a given damage threshold. The results highlight a promising correlation between defect engineering and conduction mechanisms, offering valuable insights into the versatile electrical properties of CrN films. These implantation-induced defects scatter carriers, leading to a decrease in their mobility. As the implantation dose increases, the defect landscape evolves, modifying the density of states. However, up to a dose of 0.050 dpa, no significant influence on phonon scattering is observed. This approach demonstrates that ion implantation enables precise tuning of CrN's electrical properties without affecting thermal conductivity, offering valuable insights into defect engineering in transition metal nitrides and underscoring its potential for transport properties decorrelation.

Place, publisher, year, edition, pages
WILEY , 2025. Vol. 12, no 22, article id e00436
Keywords [en]
defects; electrical properties; ion implantation; thin films; thermal conductivity
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-217909DOI: 10.1002/admi.202500436ISI: 001565611300001Scopus ID: 2-s2.0-105015438513OAI: oai:DiVA.org:liu-217909DiVA, id: diva2:2000567
Note

Funding Agencies|Swedish Research Council VR-RFI

Available from: 2025-09-24 Created: 2025-09-24 Last updated: 2026-02-12Bibliographically approved

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Eklund, PerLe Febvrier, Arnaud

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