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In2O3 particle films as gate material for MISiC-capacitor sensors
Lutic, D.
Växjö universitet.
Strand, M.
Växjö universitet.
Salomonsson, Anette
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .
Ojamäe, Lars
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Physical Chemistry .
ORCID iD:
0000-0002-5341-2637
Käll, Per-Olov
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Physical Chemistry .
Lloyd-Spets, Anita
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .
ORCID iD:
0000-0002-2817-3574
Sanati, M.
Växjö universitet.
Show others and affiliations
2005 (English)
In:
NOSA 2005,2005, 2005
Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2005.
Keywords [en]
gate material, MISiC-capacitor, sensor
National Category
Natural Sciences
Identifiers
URN:
urn:nbn:se:liu:diva-30829
Local ID: 16476
OAI: oai:DiVA.org:liu-30829
DiVA, id:
diva2:251652
Available from:
2009-10-09
Created:
2009-10-09
Last updated:
2015-03-09
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Salomonsson, Anette
Ojamäe, Lars
Käll, Per-Olov
Lloyd-Spets, Anita
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Ojamäe, Lars
Käll, Per-Olov
Lloyd-Spets, Anita
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modern-language-association-8th-edition
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oxford
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