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Modification of vapor sensitivity in ellipsometric gas sensing by copper deposition in porous silicon
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Optics .ORCID iD: 0000-0001-9229-2028
2002 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, E-ISSN 1873-3077, Vol. 85, no 1-2, p. 95-103Article in journal (Refereed) Published
Abstract [en]

The sensitivities of porous silicon layers modified by copper deposition to low vapor concentrations of methanol, ethanol and 2-propanol are studied with spectroscopic ellipsometry. The porous silicon layers are prepared with electrochemical etching in hydrofluoric acid, and copper deposition is done in aqueous CuSO4. The ellipsometric vapor sensitivities, in terms of the ellipsometric spectral shifts due to gas exposures, of these samples and their oxides are studied and compared. It is shown that ellipsometric vapor sensitivities of porous silicon layers to alcohols are improved by copper deposition. It is also found that the oxidation of copper deposited in porous silicon layers shows improved selectivity to methanol. © 2002 Elsevier Science B.V. All rights reserved.

Place, publisher, year, edition, pages
2002. Vol. 85, no 1-2, p. 95-103
Keywords [en]
Alcohols, Copper deposition, Ellipsometric gas sensitivity, Porous silicon
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-46969DOI: 10.1016/S0925-4005(02)00059-XOAI: oai:DiVA.org:liu-46969DiVA, id: diva2:267865
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2021-09-27
In thesis
1. Gas Sensing Based on Ellipsometric Readout: Methodology and Development
Open this publication in new window or tab >>Gas Sensing Based on Ellipsometric Readout: Methodology and Development
2003 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

The concept of an ellipsometric sensor array system - "an optical nose" - is presented. The system is used to monitor and discriminate gases. The optical readout is based on polarizer-compensator-sample-analyzer (PCSA) off-null ellipsometry. Thin porous silicon sensing layers with and without surface chemical modifications are used to measure low concentration methanol, ethanol and 2-propanol gases. The main contents of the thesis are:

- Principle and construction of a prototype PCSA ellipsometric gas sensor system.

- Optimization of the azimuth angle settings of the optical components in PCSA off-null ellipsometry to obtain the maximum readout sensitivity.

- Application of return-path off-null ellipsometry in gas sensing as an alternative way to construct ellipsometric gas sensors.

- Modification of porous silicon sensing layers by copper deposition to obtain different gas sensitivity for the enhancement of selectivity.

- Multi-sensing concept of the optical nose to detect and discriminate alcohols using porous silicon sensing layers and pattern recognition techniques.

So far, a prototype PCSA ellipsometric gas sensor system has been constructed and tested. Low concentration methanol, ethanol and 2-propanol vapors are detected and discriminated based on the PCSA off-null ellipsometric gas sensor system and porous silicon sensing layers.

Place, publisher, year, edition, pages
Linköping: Linköping University, 2003. p. 32
Series
Linköping Studies in Science and Technology. Dissertations, ISSN 0345-7524 ; 826
National Category
Computer Sciences
Identifiers
urn:nbn:se:liu:diva-177914 (URN)9173736597 (ISBN)
Public defence
2003-05-27, Planck, Fysikhuset, Campus Valla, Linköping, 10:15 (English)
Opponent
Note

All or some of the partial works included in the dissertation are not registered in DiVA and therefore not linked in this post.

Available from: 2021-07-07 Created: 2021-07-07 Last updated: 2023-03-01Bibliographically approved

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Wang, GuoliangArwin, Hans

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