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Multi-surface phase-shifting algorithm using the window function fitted by the nonlinear least squares method
Shanghai Univ, Peoples R China.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-5966-590X
Shanghai Univ, Peoples R China.
Shanghai Univ, Peoples R China.
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2022 (English)In: Journal of Modern Optics, ISSN 0950-0340, E-ISSN 1362-3044, Vol. 69, no 3, p. 160-171Article in journal (Refereed) Published
Abstract [en]

A multi-surface phase demodulation algorithm is proposed to measure surfaces of the transparent plate simultaneously. A non-linear least-squares method based on the trust region is utilized to fit the window function derived from the characteristic polynomials. The fitted window function requires fewer parameters and has a flexible form, which means the window length can be stretched freely and used flexibly. Then, a multi-surface phase demodulation technique combining the discrete Fourier principle and the fitted window function is investigated, allowing simultaneous reconstruction of the measured front surface, rear surface, and thickness variation. During the implementation of our algorithm, the processing time for the interferograms with 850x850 pixels is around 5.1s. Measurement errors caused by several factors are analyzed, including wavelength-tuning error, frequency order error, cavity length error, and average thickness error. The experimental result on a rectangular transparent plate further verifies the effectiveness of our algorithm.

Place, publisher, year, edition, pages
TAYLOR & FRANCIS LTD , 2022. Vol. 69, no 3, p. 160-171
Keywords [en]
Interferometry; wavelength-tuning; fitting algorithm; non-linear least-squares; error analysis
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:liu:diva-181917DOI: 10.1080/09500340.2021.2011971ISI: 000728482600001OAI: oai:DiVA.org:liu-181917DiVA, id: diva2:1622092
Note

Funding Agencies|National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [51775326]

Available from: 2021-12-21 Created: 2021-12-21 Last updated: 2022-10-07

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Valyukh, Sergiy
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Thin Film PhysicsFaculty of Science & Engineering
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CiteExportLink to record
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  • apa
  • ieee
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Language
  • de-DE
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Output format
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