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Stitching interferometry of cylindrical surface
Shanghai Univ, Peoples R China.
Shanghai Univ, Peoples R China.
Shanghai Univ, Peoples R China.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-5966-590X
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2022 (English)In: Optics and lasers in engineering, ISSN 0143-8166, E-ISSN 1873-0302, Vol. 157, article id 107114Article in journal (Refereed) Published
Abstract [en]

High resolution and high precision are advantages of measuring cylindrical objects employing stitching interferometry. However, due to errors in the cylinder position in a measurement procedure, it is difficult to ensure the accuracy of a macroscopic shape contour and surface waviness contour of the workpiece of the stitching results. To overcome this problem, we proposed a new strategy of stitching interferometry for cylindricity calibration. The measuring process is divided into two parts to measure the macroscopic shape and waviness contour, respectively. Finally, the two measurement results are merged to produce an accurate and complete 360 degrees form map. Besides, we build a two-dimensional Gaussian filter weighting function for a cylindrical profile according to its special shape characteristic. To express the stitching results more precisely, we provide the uncertainty map and power spectral density of the stitching results. An experiment is carried out by taking a ceramic plug gage as the workpiece. The results demonstrate the excellent performance of our method in analyzing the characteristic of the cylindrical profile and show good agreement with such by using cylindricity measuring instruments.

Place, publisher, year, edition, pages
ELSEVIER SCI LTD , 2022. Vol. 157, article id 107114
Keywords [en]
Stitching interferometry; Cylindricity; Two-Dimensional Gaussian Weighting; Function; Ceramic plug gage; Power Spectrum Density; 2D Legendre polynomials
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:liu:diva-186128DOI: 10.1016/j.optlaseng.2022.107114ISI: 000807945900005OAI: oai:DiVA.org:liu-186128DiVA, id: diva2:1672836
Note

Funding Agencies|Research Fund of National Natural Science Foundation of China [51775326]

Available from: 2022-06-20 Created: 2022-06-20 Last updated: 2022-06-20

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Valyukh, Sergiy
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